{"id":"W2589533617","doi":"10.1155/2017/8613571","title":"A Fabrication Process for Emerging Nanoelectronic Devices Based on Oxide Tunnel Junctions","year":2017,"lang":"en","type":"article","venue":"Journal of Nanomaterials","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":7,"is_retracted":false,"has_abstract":true,"ca_institutions":"Canadian Institute for Advanced Research; Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"Fonds de recherche du Québec – Nature et technologies; Natural Sciences and Engineering Research Council of Canada","keywords":"Materials science; Transistor; Fabrication; Oxide; Nanotechnology; Optoelectronics; Planar; Field-effect transistor; Back end of line; Silicon; CMOS; Electrical engineering; Engineering physics; Engineering; Computer science; Voltage; Metallurgy; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009282398,0.0002088024,0.0001321236,0.0001653049,0.0003321011,0.0002269871,0.0003138782,0.000279972,0.0008837975],"category_scores_gemma":[0.000102184,0.0001465645,0.0001364502,0.0000969618,0.0001833133,0.000314863,0.0002506966,0.0005238913,0.0003386395],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001422115,"about_ca_system_score_gemma":0.0002505525,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001532584,"about_ca_topic_score_gemma":0.0003698783,"domain_scores_codex":[0.9999304,0.000002789923,0.000003698079,0.00001386266,0.00004033815,0.000008923429],"domain_scores_gemma":[0.9999565,0.000008432567,0.00001058505,0.00000809673,0.000008384125,0.000007996792],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000004573557,0.00001513815,0.00006344867,0.00005139088,0.000001691984,0.00009780646,0.00002698076,0.0001572265,0.9953998,0.001251972,0.0001120252,0.002818003],"study_design_scores_gemma":[0.00001261217,0.0001126317,0.0005664542,0.000008549624,0.000005809212,0.000429616,0.00002134559,0.001461659,0.9827827,0.0005412422,0.01404849,0.000008889378],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7403421,0.005031513,0.2344377,0.000881358,0.0006217653,0.0004565808,0.0007403615,0.0006968041,0.01679182],"genre_scores_gemma":[0.8211707,0.002363425,0.169368,0.0001853458,0.00005430805,0.0001922353,0.0003347961,0.00006125798,0.006269958],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0008837975,"threshold_uncertainty_score":0.002956569,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02738212809268028,"score_gpt":0.2924056011832107,"score_spread":0.2650234730905304,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}