{"id":"W2590822888","doi":"10.1557/proc-716-b7.24","title":"Effect of Ion-Accelerated Plasma Hydrogenation and Thermal Treatments on Hydrogen Silsesquioxane (HSQ) Low-K Dielectric Films","year":2002,"lang":"en","type":"article","venue":"MRS Proceedings","topic":"Silicone and Siloxane Chemistry","field":"Materials Science","cited_by":1,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Waterloo","funders":"","keywords":"Materials science; Hydrogen silsesquioxane; Dielectric; Hydrogen; Plasma-enhanced chemical vapor deposition; Fourier transform infrared spectroscopy; Analytical Chemistry (journal); Plasma; Ion; Thin film; Resist; Chemical engineering; Chemistry; Nanotechnology; Layer (electronics); Organic chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003000131,0.0004140429,0.0004748502,0.0001297849,0.0003288174,0.0003704042,0.0002813108,0.0004585342,0.002594541],"category_scores_gemma":[0.0005166452,0.000362205,0.0002702737,0.0002280235,0.0004442548,0.0005103078,0.0001808533,0.0004894394,0.0002858745],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002985041,"about_ca_system_score_gemma":0.0002555633,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0009353342,"about_ca_topic_score_gemma":0.001499059,"domain_scores_codex":[0.9998124,0.00002723746,0.00001864251,0.0000408102,0.00003497845,0.00006603944],"domain_scores_gemma":[0.9995986,0.0001692787,0.0000758438,0.00004158133,0.00007274168,0.00004206843],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.001376551,0.00003518726,0.0002076006,0.0001047382,0.00002749373,0.00008737574,0.0000790556,0.0001544115,0.9960284,0.00004223865,0.00006258037,0.001794338],"study_design_scores_gemma":[0.00003270616,0.0002725734,0.001262333,0.000002083814,0.00001306006,0.00004383887,0.00002633805,0.0001805218,0.9977888,0.000008137529,0.0003645352,0.000005034765],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9981478,0.0007157457,0.0003703825,0.00004638653,0.00002557775,0.0000148831,0.00008163411,0.00003412994,0.0005634019],"genre_scores_gemma":[0.9975291,0.0004867673,0.0007229866,0.00005651566,0.00001657893,0.00001206863,0.0001103433,0.00003221308,0.001033543],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002594541,"threshold_uncertainty_score":0.008679569,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01101186516409316,"score_gpt":0.2233199913249274,"score_spread":0.2123081261608342,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}