{"id":"W2591188832","doi":"10.31399/asm.cp.istfa2012p0455","title":"Fabrication and Characterization of Helium and Neon Ion Deposited Platinum Wires for Circuit Edit Applications","year":2012,"lang":"en","type":"article","venue":"Proceedings - International Symposium for Testing and Failure Analysis","topic":"Integrated Circuits and Semiconductor Failure Analysis","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Fibics (Canada)","funders":"","keywords":"Materials science; Nanolithography; Ion beam; Focused ion beam; Neon; Platinum; Fabrication; Ion beam-assisted deposition; Deposition (geology); Nanotechnology; Ion; Dielectric; Ion beam deposition; Electrical resistivity and conductivity; Optoelectronics; Ion source; Conductivity; Electrical engineering; Atomic physics; Chemistry; Argon; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002054626,0.0001803438,0.0002781756,0.0003489862,0.0001502356,0.0001237664,0.0000920347,0.0001133665,0.000004016404],"category_scores_gemma":[0.0001063708,0.0001774463,0.00008620357,0.0005504485,0.00004447034,0.0004494155,0.00001874202,0.00007773841,2.736542e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00003849842,"about_ca_system_score_gemma":0.000005157518,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00004719571,"about_ca_topic_score_gemma":0.000009099332,"domain_scores_codex":[0.9990279,0.000003825897,0.0003722542,0.0002522709,0.0001414446,0.000202318],"domain_scores_gemma":[0.9988464,0.000144548,0.0002028474,0.00006157267,0.0006555355,0.00008915074],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.000009473906,0.00003077877,0.1030377,0.000210124,0.0009602914,2.204434e-8,0.0007342218,0.00007548765,0.8879292,0.002390058,0.00008903838,0.004533627],"study_design_scores_gemma":[0.001551468,0.0002578814,0.05214826,0.0002509741,0.009077209,0.00004681603,0.001486262,0.7585729,0.1590898,0.001608241,0.01452663,0.001383542],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.913786,0.0002510048,0.08416737,0.0003556478,0.0001114897,0.0005593874,0.0001860554,0.0001472635,0.0004357714],"genre_scores_gemma":[0.996217,0.00008153975,0.002475471,0.00002430504,0.000443266,0.0002632976,0.000399713,0.00002531055,0.00007011092],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.7584974,"threshold_uncertainty_score":0.7236051,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01247026822303813,"score_gpt":0.215618957220003,"score_spread":0.2031486889969648,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}