{"id":"W2591188832","doi":"10.31399/asm.cp.istfa2012p0455","title":"Fabrication and Characterization of Helium and Neon Ion Deposited Platinum Wires for Circuit Edit Applications","year":2012,"lang":"en","type":"article","venue":"Proceedings - International Symposium for Testing and Failure Analysis","topic":"Integrated Circuits and Semiconductor Failure Analysis","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Fibics (Canada)","funders":"","keywords":"Materials science; Nanolithography; Ion beam; Focused ion beam; Neon; Platinum; Fabrication; Ion beam-assisted deposition; Deposition (geology); Nanotechnology; Ion; Dielectric; Ion beam deposition; Electrical resistivity and conductivity; Optoelectronics; Ion source; Conductivity; Electrical engineering; Atomic physics; Chemistry; Argon; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001591055,0.0001561234,0.0002124723,0.0002408444,0.0002373013,0.0002719106,0.0004308424,0.0002797249,0.0009908094],"category_scores_gemma":[0.0006884253,0.0001307607,0.000109385,0.0002512606,0.000145163,0.0002280363,0.0001867485,0.0001561139,0.0002071528],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003028608,"about_ca_system_score_gemma":0.0001659236,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000556342,"about_ca_topic_score_gemma":0.001058005,"domain_scores_codex":[0.9998535,0.00001113722,0.000009931066,0.00003088151,0.00007702593,0.00001760991],"domain_scores_gemma":[0.9997081,0.00006222774,0.00007374485,0.00005718163,0.00007691402,0.00002186133],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00006351642,0.00001107258,0.0008655604,0.00005856783,0.000005048532,0.000167802,0.000099672,0.001053047,0.9940461,0.0001759028,0.0001602238,0.003293338],"study_design_scores_gemma":[0.00001144817,0.000378884,0.007116288,0.000005461719,0.000008754995,0.0001626393,0.00007121457,0.004304675,0.9852284,0.00004767184,0.002657073,0.000007519029],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9913464,0.0002076553,0.005356214,0.00006012509,0.00002940842,0.00004672193,0.0003228413,0.0001295834,0.002500981],"genre_scores_gemma":[0.9897922,0.0001308212,0.007258434,0.00001410725,0.000003583031,0.00003633454,0.0002033123,0.00003325026,0.002528026],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0009908094,"threshold_uncertainty_score":0.003314555,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01247026822303813,"score_gpt":0.215618957220003,"score_spread":0.2031486889969648,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}