{"id":"W2593313925","doi":"10.1016/j.apsusc.2017.02.231","title":"Chemical metallization of KMPR photoresist polymer in aqueous solutions","year":2017,"lang":"en","type":"article","venue":"Applied Surface Science","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":9,"is_retracted":false,"has_abstract":false,"ca_institutions":"Polytechnique Montréal; McGill University; MiQro Innovation Collaborative Centre","funders":"Thai Nguyen University of Technology","keywords":"Photoresist; Aqueous solution; Polymer; Materials science; Nanotechnology; Chemical engineering; Polymer science; Chemistry; Polymer chemistry; Composite material; Organic chemistry; Engineering; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001171167,0.0001996164,0.0001419616,0.0001218689,0.0001578796,0.0001449562,0.0002448173,0.0002074075,0.003531049],"category_scores_gemma":[0.0002033655,0.000139035,0.0001342943,0.0001135443,0.000162958,0.0001810245,0.0001282977,0.000297231,0.0004468515],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001764624,"about_ca_system_score_gemma":0.0001259117,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005653584,"about_ca_topic_score_gemma":0.0008612851,"domain_scores_codex":[0.9998748,0.00000878897,0.000007026357,0.00002945303,0.00003793988,0.00004193827],"domain_scores_gemma":[0.9999427,0.00001966901,0.00001389519,0.000009888731,0.000008831158,0.000004999316],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005058883,0.000005712347,0.00005814515,0.00004420203,0.000003639312,0.00005718362,0.00002783478,0.00004652268,0.9983832,0.00008794203,0.00005966076,0.001175366],"study_design_scores_gemma":[0.000003588692,0.00004893034,0.0004001305,0.000001417857,0.000002142277,0.0000282596,0.00001290623,0.0001786033,0.9988418,0.00001121268,0.0004699389,9.820729e-7],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9916516,0.0004799758,0.002408233,0.000135367,0.00003500592,0.00002336351,0.0001210268,0.0001243179,0.005021018],"genre_scores_gemma":[0.9948545,0.0002855754,0.001248082,0.00002830755,0.000009356569,0.00001064068,0.00009954559,0.00001739866,0.003446647],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.003531049,"threshold_uncertainty_score":0.01181251,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01997982987654758,"score_gpt":0.2397295870393487,"score_spread":0.2197497571628011,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}