{"id":"W2594610063","doi":"","title":"An integrated sp3t rf MEMS switch","year":2002,"lang":"en","type":"article","venue":"International Symposium on Antenna Technology and Applied Electromagnetics","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Microelectromechanical systems; Port (circuit theory); Chip; Crossover switch; Optical switch; Electronic engineering; RF switch; Isolation (microbiology); Radio frequency; Materials science; Electrical engineering; Engineering; Computer science; Optoelectronics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.000041815,0.0002641461,0.0002070993,0.0003841591,0.00008791,0.00003980285,0.0004316773,0.0003649238,0.00008179309],"category_scores_gemma":[0.00001266845,0.000250859,0.00002978677,0.0004219998,0.0002045944,0.00007860386,0.00004403074,0.000550852,0.0000621259],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00006180947,"about_ca_system_score_gemma":0.000002849893,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000001766688,"about_ca_topic_score_gemma":0.000008165869,"domain_scores_codex":[0.9989119,0.000001564036,0.0002349398,0.0003364799,0.0001467277,0.000368344],"domain_scores_gemma":[0.9995274,0.00002351384,0.00004125564,0.0003018197,0.00004939325,0.00005660441],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001597293,0.00008462235,0.00003913838,0.000005107936,0.00003782112,0.00001125693,0.00002408107,0.0001288362,0.9361264,0.02994892,0.0003073105,0.0332706],"study_design_scores_gemma":[0.00116822,0.001421549,0.000282076,0.00004734749,0.00003049547,0.0001781903,0.0002751264,0.02227322,0.8977791,0.01909572,0.05662093,0.0008280004],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9753907,0.0005062286,0.003078048,0.002502174,0.000301172,0.0002113502,0.0000145961,0.002790778,0.01520494],"genre_scores_gemma":[0.9948778,0.002359834,0.002093556,0.0001625434,0.00005605567,0.00006344958,0.00001503439,0.00004242323,0.0003292621],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.05631362,"threshold_uncertainty_score":0.9999943,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005878335195486858,"score_gpt":0.2068686129053008,"score_spread":0.200990277709814,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}