{"id":"W2594610063","doi":"","title":"An integrated sp3t rf MEMS switch","year":2002,"lang":"en","type":"article","venue":"International Symposium on Antenna Technology and Applied Electromagnetics","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Microelectromechanical systems; Port (circuit theory); Chip; Crossover switch; Optical switch; Electronic engineering; RF switch; Isolation (microbiology); Radio frequency; Materials science; Electrical engineering; Engineering; Computer science; Optoelectronics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001189741,0.000306444,0.0002631269,0.0001496066,0.0002201609,0.0005655395,0.0005183855,0.0005344269,0.00222651],"category_scores_gemma":[0.0001538064,0.0001568034,0.000318193,0.0001992524,0.0001166831,0.0005038732,0.000255119,0.0003503471,0.0006176202],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002399722,"about_ca_system_score_gemma":0.0002275038,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002900707,"about_ca_topic_score_gemma":0.000358819,"domain_scores_codex":[0.9998123,0.00001298099,0.000005597534,0.00004216725,0.0000958549,0.00003108856],"domain_scores_gemma":[0.9999113,0.00001108662,0.00001416851,0.00001124118,0.00003509871,0.00001710043],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001631606,0.00007932446,0.0009240409,0.00006481075,0.00004812456,0.0003827909,0.0000332436,0.001622915,0.9762886,0.001702413,0.0008764961,0.01781414],"study_design_scores_gemma":[0.0001036586,0.001566182,0.00918039,0.00001636852,0.0002553014,0.002907943,0.00005999565,0.06374517,0.8845653,0.0009286386,0.03661994,0.00005103467],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8162435,0.001866419,0.1454741,0.000479592,0.000640211,0.00008961038,0.0002848056,0.001917667,0.03300412],"genre_scores_gemma":[0.9372801,0.0005138626,0.0536223,0.0002088367,0.0001616694,0.00004862915,0.0002232859,0.00007172352,0.007869704],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00222651,"threshold_uncertainty_score":0.007448375,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005878335195486858,"score_gpt":0.2068686129053008,"score_spread":0.200990277709814,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}