{"id":"W2595063396","doi":"10.1109/tmtt.2017.2671359","title":"Design and Sensitivity Improvement of CMOS-MEMS Scanning Microwave Microscopes","year":2017,"lang":"en","type":"article","venue":"IEEE Transactions on Microwave Theory and Techniques","topic":"Near-Field Optical Microscopy","field":"Engineering","cited_by":8,"is_retracted":false,"has_abstract":true,"ca_institutions":"RealNetworks (Canada); University of Waterloo","funders":"","keywords":"Microelectromechanical systems; Microwave; Sensitivity (control systems); CMOS; Microscope; Materials science; Electronic engineering; Optoelectronics; Microwave engineering; Electrical engineering; Computer science; Engineering; Optics; Physics; Telecommunications","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004898977,0.0004659909,0.0003028605,0.0002538186,0.0001989576,0.0002976538,0.0007556655,0.0004896006,0.0008147652],"category_scores_gemma":[0.0008717709,0.0003529485,0.0002991736,0.0001661763,0.0001785305,0.0004530648,0.0003302276,0.0002549811,0.0003506262],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000708145,"about_ca_system_score_gemma":0.0002927905,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003667631,"about_ca_topic_score_gemma":0.0007131402,"domain_scores_codex":[0.999441,0.00006996011,0.00002400465,0.00009775726,0.0003283917,0.0000390449],"domain_scores_gemma":[0.9995143,0.0001421409,0.00009952699,0.00004548142,0.0001804981,0.0000179791],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001077273,0.00002856415,0.001314107,0.0003142544,0.00003935276,0.0000858797,0.00007582522,0.01021405,0.9467052,0.003128202,0.0004958398,0.03749086],"study_design_scores_gemma":[0.00003929437,0.000675061,0.00479316,0.00003865824,0.00008323887,0.000549637,0.00003457756,0.1661182,0.8119969,0.001009581,0.01462105,0.00004053076],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.2344295,0.003410522,0.7500528,0.0004392877,0.0001591867,0.0002489286,0.0001846581,0.001700201,0.009374894],"genre_scores_gemma":[0.6745759,0.0006627903,0.3214678,0.0001219567,0.00006498651,0.0001243924,0.00006989744,0.00007294863,0.002839224],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.0008147652,"threshold_uncertainty_score":0.00513798,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01150877512767532,"score_gpt":0.2478745634914795,"score_spread":0.2363657883638042,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}