{"id":"W2595063396","doi":"10.1109/tmtt.2017.2671359","title":"Design and Sensitivity Improvement of CMOS-MEMS Scanning Microwave Microscopes","year":2017,"lang":"en","type":"article","venue":"IEEE Transactions on Microwave Theory and Techniques","topic":"Near-Field Optical Microscopy","field":"Engineering","cited_by":8,"is_retracted":false,"has_abstract":true,"ca_institutions":"RealNetworks (Canada); University of Waterloo","funders":"","keywords":"Microelectromechanical systems; Microwave; Sensitivity (control systems); CMOS; Microscope; Materials science; Electronic engineering; Optoelectronics; Microwave engineering; Electrical engineering; Computer science; Engineering; Optics; Physics; Telecommunications","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0007081861,0.0002565749,0.0003019424,0.0001028594,0.0003322991,0.0001143123,0.0001078125,0.0001696428,0.00001563281],"category_scores_gemma":[0.00001079545,0.000255754,0.0000639434,0.00003878255,0.0004235548,0.0001989645,0.000007597674,0.0003198858,0.000002917074],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00003619326,"about_ca_system_score_gemma":0.00001422303,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00002699135,"about_ca_topic_score_gemma":0.00001487018,"domain_scores_codex":[0.999063,0.00007059157,0.0002498015,0.0002774239,0.00007179162,0.00026737],"domain_scores_gemma":[0.9990994,0.0002751558,0.00007224682,0.000421838,0.00004561759,0.00008578369],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001233545,0.0000402921,0.000003762356,0.00009566119,0.00006036764,0.000009045228,0.0002034918,0.00005845178,0.9264259,0.0002716909,0.00003501761,0.07267296],"study_design_scores_gemma":[0.0002351675,0.0002108917,0.00001597497,0.0001755445,0.00005478758,0.00003775063,0.0000515576,0.000131388,0.9956251,0.003126012,0.00008295006,0.0002528805],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.3686084,0.0001251471,0.6301718,0.00002703558,0.00009788076,0.0002895611,0.00001627635,0.0001592407,0.0005046962],"genre_scores_gemma":[0.9588104,0.0004213215,0.04051054,0.00006560206,0.00002020423,0.00002808318,6.272847e-7,0.00004143413,0.000101793],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.590202,"threshold_uncertainty_score":0.9999894,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01150877512767532,"score_gpt":0.2478745634914795,"score_spread":0.2363657883638042,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}