{"id":"W2601529794","doi":"10.1149/ma2012-02/40/2984","title":"Micro-Structural Analysis of AlN Wafer Bonding and Hydrogen Ion-Induced Splitting for Film Exfoliation","year":2012,"lang":"en","type":"article","venue":"ECS Meeting Abstracts","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Université de Montréal","funders":"","keywords":"Wafer; Exfoliation joint; Materials science; Wafer bonding; Optoelectronics; Ion; Hydrogen; Nanotechnology; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004375678,0.0001392113,0.0002710066,0.000158057,0.00007112393,0.00004187662,0.00006218154,0.00008899788,0.00001618569],"category_scores_gemma":[0.000112556,0.0001361974,0.00007580379,0.0001658617,0.000009755982,0.0002146527,0.00001928743,0.0000555321,0.000002229279],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00002926553,"about_ca_system_score_gemma":0.000004954785,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00007351446,"about_ca_topic_score_gemma":0.000005162029,"domain_scores_codex":[0.9990898,0.0000134412,0.0003771394,0.0001327767,0.00009717891,0.0002896815],"domain_scores_gemma":[0.9994476,0.0001684982,0.0001546455,0.0001164585,0.00003638674,0.00007642728],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00000401662,0.000003415499,0.0119112,0.0001079555,0.0001886064,1.682044e-7,0.0006886619,0.01459664,0.9723988,0.000009996351,0.00002053156,0.00007008178],"study_design_scores_gemma":[0.0001473893,0.000006479458,0.06233157,0.0000461984,0.0002867977,0.00000220071,0.0001894217,0.01122568,0.9254112,0.0000304574,0.0001649746,0.0001576678],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.997582,0.0004894751,0.000003178435,0.00001113412,0.0003796454,0.0001098076,0.00002296085,0.00008386456,0.001317971],"genre_scores_gemma":[0.9977866,0.000005979631,0.001835977,0.00001057143,0.0002753894,0.000006825962,0.00004154713,0.00002558867,0.00001152092],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.05042037,"threshold_uncertainty_score":0.5553968,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01920814297159514,"score_gpt":0.2503322970911679,"score_spread":0.2311241541195727,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}