{"id":"W2606642945","doi":"10.11159/icnnfc17.129","title":"A Fabrication Process for Nanopatterns Shrinkage with Variable Sizesfor Large Area","year":2017,"lang":"en","type":"article","venue":"Proceedings of the World Congress on Recent Advances in Nanotechnology","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"Bundesministerium für Bildung und Forschung","keywords":"Shrinkage; Fabrication; Process (computing); Materials science; Variable (mathematics); Computer science; Composite material; Mathematics","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":true,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001909537,0.0002768842,0.0002254703,0.0002866176,0.0002996809,0.0001884917,0.0003928564,0.000284678,0.000731875],"category_scores_gemma":[0.0002177231,0.00024398,0.0002774817,0.0001867988,0.0002001972,0.0004424143,0.0002993086,0.0005949065,0.0004421086],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002287214,"about_ca_system_score_gemma":0.0002430518,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001224956,"about_ca_topic_score_gemma":0.0003178238,"domain_scores_codex":[0.9998386,0.000007766691,0.00001497772,0.00004484528,0.00007840213,0.00001538511],"domain_scores_gemma":[0.9997631,0.00003941096,0.0000891591,0.00006178481,0.00003202808,0.00001457384],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000009297932,0.00001335013,0.00008567081,0.00006532526,0.000002949359,0.00004001232,0.00001708275,0.0002253114,0.9920718,0.0004363245,0.0001090872,0.006923792],"study_design_scores_gemma":[0.000005182827,0.00008208953,0.0009283737,0.000004998905,0.000008820702,0.0003765619,0.000007517023,0.002749803,0.9889017,0.0001426643,0.006782926,0.000009287526],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.4330235,0.003870893,0.5517104,0.000325617,0.0003273706,0.0004308511,0.0006236978,0.001726627,0.007961097],"genre_scores_gemma":[0.6318488,0.001826092,0.3607019,0.0001669464,0.00008346456,0.0003335375,0.00068886,0.000197322,0.004153143],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.000731875,"threshold_uncertainty_score":0.00244838,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01016262401707395,"score_gpt":0.2687436796289915,"score_spread":0.2585810556119176,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}