{"id":"W2608431812","doi":"10.1149/ma2005-02/17/684","title":"Formation of Copper Pillar Bumps by High Speed Copper Electroplating","year":2006,"lang":"en","type":"article","venue":"ECS Meeting Abstracts","topic":"Electrodeposition and Electroless Coatings","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Nexen (Canada)","funders":"","keywords":"Copper; Electroplating; Pillar; Metallurgy; Materials science; Copper plating; Engineering; Nanotechnology; Mechanical engineering; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001329236,0.0002745196,0.0002270825,0.0003166768,0.0002464597,0.000311298,0.0003660203,0.0003470936,0.00195697],"category_scores_gemma":[0.00050801,0.0003125187,0.0001732581,0.0001865996,0.0002026893,0.0003217971,0.0003129781,0.0003193692,0.0007461559],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001629431,"about_ca_system_score_gemma":0.0001569564,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003199049,"about_ca_topic_score_gemma":0.0006611188,"domain_scores_codex":[0.9998273,0.00001403314,0.000008479189,0.00003306678,0.00007262197,0.00004453383],"domain_scores_gemma":[0.999837,0.00002993669,0.00003269345,0.00004439191,0.00003253935,0.00002345169],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000721156,0.0000172758,0.0001100019,0.0001296283,0.000008411831,0.0001563852,0.00004222112,0.0002638341,0.9896501,0.0002921888,0.0006363172,0.008621597],"study_design_scores_gemma":[0.00001472132,0.0001288361,0.0004768488,0.000003796885,0.000005089975,0.0001044801,0.0000119662,0.001051296,0.9951667,0.00007345362,0.002958398,0.000004376031],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9644911,0.003384503,0.01796506,0.00020971,0.0004266961,0.0001607128,0.0003135255,0.0007151903,0.01233346],"genre_scores_gemma":[0.9768885,0.0007986093,0.01555733,0.00003102211,0.00003281072,0.00003163698,0.0001848138,0.00008832784,0.006386944],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00195697,"threshold_uncertainty_score":0.006546736,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004219523478475111,"score_gpt":0.1863420681083011,"score_spread":0.182122544629826,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}