{"id":"W2611406581","doi":"10.1109/jmems.2017.2675987","title":"Practical CMUT Fabrication With a Nitride-to-Oxide-Based Wafer Bonding Process","year":2017,"lang":"en","type":"article","venue":"Journal of Microelectromechanical Systems","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":14,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"Natural Sciences and Engineering Research Council of Canada; University of Waterloo; Université de Sherbrooke; CMC Microsystems","keywords":"Capacitive micromachined ultrasonic transducers; Materials science; Wafer bonding; Wafer; Fabrication; Silicon on insulator; Optoelectronics; LOCOS; Surface micromachining; Microelectromechanical systems; Silicon nitride; Electronic engineering; Silicon; Piezoelectricity; Composite material; Engineering","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003318878,0.0006245944,0.0003176414,0.0003857148,0.0006232389,0.0004714433,0.0007027712,0.0006421171,0.001947173],"category_scores_gemma":[0.0006231397,0.0003898628,0.0001734032,0.0003854065,0.0003223769,0.0005991465,0.0004930014,0.0005508468,0.0005547921],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004261467,"about_ca_system_score_gemma":0.0006642339,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005885109,"about_ca_topic_score_gemma":0.001691764,"domain_scores_codex":[0.9997262,0.000024044,0.0000166163,0.00007865671,0.0001134459,0.00004108153],"domain_scores_gemma":[0.9997712,0.00004952809,0.00004166417,0.00004031408,0.00007676593,0.0000205093],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001920019,0.00001082012,0.0001631058,0.0001372416,0.000004122071,0.00009781807,0.00009009344,0.0003043639,0.9913362,0.0008494919,0.0002741409,0.006713491],"study_design_scores_gemma":[0.000007136414,0.0001405754,0.001283543,0.00001534061,0.00001043058,0.0003926771,0.00006180922,0.0034338,0.9836385,0.0001323784,0.01086661,0.00001714044],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"methods","genre_scores_codex":[0.5099619,0.002006673,0.4674073,0.0003526391,0.0005472446,0.000852426,0.0009131478,0.002622324,0.01533633],"genre_scores_gemma":[0.631486,0.0007912548,0.362359,0.0000953358,0.00003907457,0.0004523385,0.0003730848,0.0001506962,0.004253298],"genre_candidate":"methods","genre_consensus":null,"teacher_disagreement_score":0.001947173,"threshold_uncertainty_score":0.006513894,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01922763668398653,"score_gpt":0.2751285167642341,"score_spread":0.2559008800802476,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}