{"id":"W2612970077","doi":"10.1016/s1474-6670(17)31113-8","title":"Actuators for RF MEMS Devices","year":2004,"lang":"en","type":"article","venue":"IFAC Proceedings Volumes","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Waterloo","funders":"","keywords":"Microelectromechanical systems; Variable capacitor; Capacitor; Inductor; Actuator; Electrical engineering; Electronic engineering; Engineering; Materials science; Optoelectronics; Voltage","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002571748,0.0008581484,0.0005089321,0.0005405706,0.001014662,0.0009375794,0.0008030614,0.001046885,0.02808543],"category_scores_gemma":[0.0002082561,0.0003122935,0.0002744662,0.0003483281,0.0004605315,0.001209977,0.0009489521,0.0008906039,0.01247637],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004113968,"about_ca_system_score_gemma":0.0002984546,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002033862,"about_ca_topic_score_gemma":0.0005924445,"domain_scores_codex":[0.9997423,0.00002045651,0.00001112231,0.00004577105,0.0001502942,0.00003007513],"domain_scores_gemma":[0.9999205,0.00001210057,0.000009880678,0.00001748992,0.00002889377,0.00001117242],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001731137,0.00006375962,0.0003240815,0.001147202,0.00004274475,0.0003262048,0.0002046383,0.0008299394,0.5200456,0.1430526,0.1261002,0.20769],"study_design_scores_gemma":[0.00001143186,0.0001002643,0.0008298008,0.00007798324,0.00001970917,0.0005544507,0.00005117388,0.001653002,0.1107169,0.009288393,0.8766723,0.00002456076],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"other","genre_gemma":"empirical","genre_scores_codex":[0.03978087,0.1112847,0.1648171,0.009105053,0.02445901,0.0004013152,0.001688256,0.004160789,0.6443029],"genre_scores_gemma":[0.1506509,0.02895167,0.06399781,0.001935228,0.003870341,0.0003506998,0.001539468,0.0005224539,0.7481813],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.02808543,"threshold_uncertainty_score":0.09395516,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.00996036259175967,"score_gpt":0.2274081579483381,"score_spread":0.2174477953565784,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}