{"id":"W2613009272","doi":"10.3390/s17051121","title":"Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator","year":2017,"lang":"en","type":"article","venue":"Sensors","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":16,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Actuator; Nonlinear system; Laser Doppler vibrometer; Microelectromechanical systems; Subharmonic function; Voltage; Noise (video); Control theory (sociology); Duffing equation; Acoustics; Physics; Laser; Materials science; Optics; Engineering; Optoelectronics; Electrical engineering; Computer science; Laser power scaling; Mathematics; Mathematical analysis","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0000539468,0.00007421055,0.0001152518,0.00004326752,0.00006142056,0.00002036702,0.0001512154,0.00005421325,0.000004232158],"category_scores_gemma":[0.0002328946,0.00006553067,0.00003311627,0.00003056744,0.00006703762,0.00007531549,0.000018226,0.00008539475,0.00001822968],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001667703,"about_ca_system_score_gemma":0.000004230742,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000008711645,"about_ca_topic_score_gemma":0.000009761265,"domain_scores_codex":[0.9995314,0.000001453042,0.0001592539,0.00009302422,0.00007478014,0.0001400428],"domain_scores_gemma":[0.9993957,0.00003179517,0.00007531594,0.0004551109,0.00002378774,0.00001827353],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000050124,0.000008834149,0.00004192773,0.00002901551,0.00001614105,0.000003146881,0.00008643293,0.0001861483,0.9822896,0.00009597346,0.00008600452,0.01715175],"study_design_scores_gemma":[0.0001192398,0.00002588152,0.003053043,0.00001748196,0.000008683923,0.000002264731,0.00006347688,0.009337798,0.983099,0.001255485,0.002920382,0.00009723643],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9988973,0.00007916299,0.0004221808,0.00006213142,0.000118507,0.00008412261,0.00001047412,0.000173876,0.0001522449],"genre_scores_gemma":[0.9943334,0.0002038316,0.005215203,0.000003351406,0.00002006087,0.000006623805,0.000002267095,0.00001724741,0.0001979486],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.01705451,"threshold_uncertainty_score":0.2672263,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0128303933057995,"score_gpt":0.2590419133944929,"score_spread":0.2462115200886934,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}