{"id":"W2613108079","doi":"10.1109/icit.2017.7915482","title":"Double stage FPCB scanning micromirror for laser pattern generation","year":2017,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":6,"is_retracted":false,"has_abstract":true,"ca_institutions":"Toronto Metropolitan University","funders":"","keywords":"Fabrication; Materials science; Microelectromechanical systems; Optics; Electrode; Silicon; Rotation (mathematics); Optoelectronics; Computer science; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002448717,0.0005675196,0.0004793753,0.0003164242,0.0002507757,0.0003404999,0.001116832,0.0006459597,0.002479264],"category_scores_gemma":[0.0004165678,0.0004723042,0.0003833724,0.0002234914,0.000202438,0.0005719908,0.0005609484,0.000586167,0.0009594721],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003367996,"about_ca_system_score_gemma":0.0003999584,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006867049,"about_ca_topic_score_gemma":0.001150565,"domain_scores_codex":[0.9993461,0.00003470201,0.00003063563,0.0001912037,0.0003326616,0.0000647386],"domain_scores_gemma":[0.999718,0.0000631792,0.00003684718,0.00006973181,0.00008401425,0.00002815931],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00006721024,0.00001289962,0.0001571718,0.0001014275,0.000008654521,0.0001204793,0.00003115739,0.0003368605,0.9752119,0.0007410485,0.0004008086,0.02281045],"study_design_scores_gemma":[0.00003788935,0.0003214923,0.001350073,0.00001152122,0.0000235665,0.001705826,0.0000269323,0.01903944,0.9606356,0.000229165,0.01658159,0.00003690854],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.3173802,0.003717613,0.6563946,0.0003064653,0.0006697708,0.0003660425,0.0005457436,0.003218641,0.01740082],"genre_scores_gemma":[0.5433576,0.000550663,0.4469577,0.0001143993,0.00007695023,0.0001693736,0.0003046975,0.0001581901,0.008310492],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.002479264,"threshold_uncertainty_score":0.008293927,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.05351849057624564,"score_gpt":0.2935126362517265,"score_spread":0.2399941456754809,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}