{"id":"W2613108079","doi":"10.1109/icit.2017.7915482","title":"Double stage FPCB scanning micromirror for laser pattern generation","year":2017,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":6,"is_retracted":false,"has_abstract":true,"ca_institutions":"Toronto Metropolitan University","funders":"","keywords":"Fabrication; Materials science; Microelectromechanical systems; Optics; Electrode; Silicon; Rotation (mathematics); Optoelectronics; Computer science; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00003493055,0.00007695299,0.000076567,0.00002482191,0.0001707273,0.00007121408,0.0001319191,0.00005791652,0.00003228216],"category_scores_gemma":[0.000006706071,0.0000690267,0.00002696572,0.000009130571,0.00001399145,0.0001978215,0.00003084867,0.0000490836,0.00001364218],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001931862,"about_ca_system_score_gemma":0.000002803193,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00004950934,"about_ca_topic_score_gemma":0.0002563682,"domain_scores_codex":[0.9996398,2.941713e-7,0.0000770199,0.0001029381,0.00003104089,0.0001488982],"domain_scores_gemma":[0.9996517,0.000004048646,0.00002346646,0.0002864561,0.00001655765,0.0000178215],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000002611186,0.000004606409,0.00009969336,0.00002973631,0.0000125748,0.000001586954,0.00003082657,0.001167552,0.9508275,0.0002112556,0.006654242,0.04095785],"study_design_scores_gemma":[0.0005057518,0.00001367726,0.0002847586,0.000007348649,0.000003070488,5.802241e-7,0.00003336152,0.01263985,0.9323309,0.00006240278,0.0539987,0.0001196176],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8170113,0.00003768788,0.178903,0.0001616318,0.0004781176,0.0002070414,0.00001356289,0.0005724171,0.002615254],"genre_scores_gemma":[0.9491904,0.00003000492,0.04023909,0.00003981016,0.000124153,0.00008051622,0.00001197945,0.00003115034,0.01025293],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1386639,"threshold_uncertainty_score":0.2814827,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.05351849057624564,"score_gpt":0.2935126362517265,"score_spread":0.2399941456754809,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}