{"id":"W2614663489","doi":"","title":"Nanoimprint lithography fabrication of photonic crystal devices","year":2006,"lang":"en","type":"article","venue":"","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":false,"ca_institutions":"L'Alliance Boviteq","funders":"","keywords":"Nanoimprint lithography; Fabrication; Photonic crystal; Materials science; Lithography; Nanotechnology; Next-generation lithography; Photonics; Optoelectronics; Electron-beam lithography; Resist","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003156032,0.0002439621,0.0005042367,0.0005307341,0.0006860086,0.0008528108,0.0007251516,0.0004902614,0.002205893],"category_scores_gemma":[0.0006362291,0.0005008889,0.0003008747,0.0004278325,0.0004295826,0.0007246296,0.0005139317,0.0009582648,0.0008558469],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0009165023,"about_ca_system_score_gemma":0.0006646136,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006019951,"about_ca_topic_score_gemma":0.00153254,"domain_scores_codex":[0.9995883,0.00002415278,0.00003369669,0.00008340115,0.0002140035,0.00005637083],"domain_scores_gemma":[0.9995797,0.0001445053,0.00007132156,0.0001142656,0.0000703292,0.00001978516],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004518267,0.00003228386,0.0001056132,0.0001310943,0.000005865091,0.0001044283,0.00009621593,0.0005284121,0.9815445,0.004231073,0.0004788227,0.01269661],"study_design_scores_gemma":[0.000008614958,0.00002824001,0.0006417728,0.000007663961,0.000003347594,0.000118524,0.00001414623,0.002294675,0.9927146,0.0003188563,0.003841016,0.000008507342],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7572808,0.00524416,0.1764745,0.0008048892,0.0005778362,0.0003122533,0.001003445,0.001380632,0.05692138],"genre_scores_gemma":[0.7772673,0.002338413,0.1993784,0.0001854211,0.0001039523,0.0002722252,0.0005190731,0.0002783933,0.01965672],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002205893,"threshold_uncertainty_score":0.007379413,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004282639539312644,"score_gpt":0.1967865725321334,"score_spread":0.1925039329928208,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}