{"id":"W2623072045","doi":"","title":"Tribological Properties of Ultrathin Films for MEMS Applications","year":2014,"lang":"en","type":"dissertation","venue":"TSpace (University of Toronto)","topic":"Force Microscopy Techniques and Applications","field":"Physics and Astronomy","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"Natural Sciences and Engineering Research Council of Canada; University of Toronto","keywords":"Tribology; Microelectromechanical systems; Materials science; Nanotechnology; Composite material","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001782822,0.0003022017,0.0002132085,0.0003646683,0.0001945822,0.0004406193,0.0002127187,0.0003268631,0.002033231],"category_scores_gemma":[0.0003626141,0.0001903438,0.0001776924,0.0002895175,0.00009398058,0.0003388176,0.0001822849,0.0004605815,0.0004674893],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001732806,"about_ca_system_score_gemma":0.0001050506,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004218426,"about_ca_topic_score_gemma":0.0007430781,"domain_scores_codex":[0.999877,0.00000756177,0.000006834306,0.00001547207,0.00007510832,0.00001814184],"domain_scores_gemma":[0.9998798,0.00002816833,0.00001791315,0.00001532922,0.00004826036,0.00001051847],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001549863,0.00001124145,0.0001959432,0.00007633789,0.000005914327,0.00003312564,0.00002151415,0.0001961603,0.9886625,0.0001269526,0.0002514032,0.01040329],"study_design_scores_gemma":[0.000008469411,0.0002444728,0.008705479,0.00004561836,0.00002493081,0.0001839513,0.00006685676,0.00274965,0.9726064,0.0002902417,0.01505882,0.00001500079],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9224305,0.03949548,0.01722278,0.0008376774,0.0003734185,0.00009587788,0.0009789286,0.0002020392,0.01836324],"genre_scores_gemma":[0.9719368,0.01024519,0.009967862,0.00012074,0.0001061861,0.00004544185,0.0003991811,0.00005252849,0.007126081],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002033231,"threshold_uncertainty_score":0.006801844,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01385753927577027,"score_gpt":0.2613142177806757,"score_spread":0.2474566785049054,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}