{"id":"W2626541645","doi":"10.1088/1361-6528/aa79ea","title":"Investigating the impact of SEM chamber conditions and imaging parameters on contact resistance of<i>in situ</i>nanoprobing","year":2017,"lang":"en","type":"article","venue":"Nanotechnology","topic":"Integrated Circuits and Semiconductor Failure Analysis","field":"Engineering","cited_by":9,"is_retracted":false,"has_abstract":true,"ca_institutions":"McGill University","funders":"Natural Sciences and Engineering Research Council of Canada; Canada Research Chairs; Canada Foundation for Innovation","keywords":"Materials science; Scanning electron microscope; Contact resistance; Vacuum chamber; Nanoprobe; Composite material; Ohm; Optics; Nanotechnology; Optoelectronics; Electrical engineering","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0007821051,0.0007603278,0.0005094123,0.0002967191,0.0003203707,0.0006251,0.0005740901,0.00059889,0.001512979],"category_scores_gemma":[0.002630041,0.0003638655,0.0002389628,0.0002642764,0.0003902737,0.001070448,0.0004191148,0.0004210853,0.0003398256],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003045712,"about_ca_system_score_gemma":0.0001510404,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003629717,"about_ca_topic_score_gemma":0.0008554852,"domain_scores_codex":[0.9992292,0.0001290677,0.00006880679,0.0002377336,0.0002514875,0.00008365456],"domain_scores_gemma":[0.9965129,0.001869621,0.0006998373,0.0003745927,0.000476844,0.00006624773],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003154554,0.00001588535,0.000441302,0.0001511118,0.00001142955,0.00006342836,0.0000640959,0.0001791202,0.9968849,0.00004632943,0.00004871465,0.002062156],"study_design_scores_gemma":[0.000002361419,0.00009807147,0.002584262,0.00000489974,0.00001492644,0.00009671136,0.00004897252,0.001319239,0.9951628,0.00002593342,0.0006313458,0.00001040493],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9678876,0.002086417,0.0274314,0.0001955565,0.00008745351,0.00009105181,0.0003533227,0.0003501735,0.001517027],"genre_scores_gemma":[0.9745184,0.001031013,0.02308805,0.0001071896,0.00003045825,0.00007816916,0.0002827402,0.0002081172,0.0006557719],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001512979,"threshold_uncertainty_score":0.005061388,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01239390774009053,"score_gpt":0.2505277461302729,"score_spread":0.2381338383901824,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}