{"id":"W272272913","doi":"10.71781/16965","title":"Étude fondamentale des mécanismes de gravure par plasma de matériaux de pointe : application à la fabrication de dispositifs photoniques","year":2005,"lang":"fr","type":"dissertation","venue":"Papyrus : Institutional Repository (Université de Montréal)","topic":"Surface Roughness and Optical Measurements","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":false,"ca_institutions":"","funders":"Division of Materials Research; Natural Sciences and Engineering Research Council of Canada; Fonds Québécois de la Recherche sur la Nature et les Technologies; National Science Foundation","keywords":"Humanities; Art; Materials science","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0006498574,0.0002955071,0.0005329304,0.0003717049,0.0008307085,0.001119835,0.0007635741,0.001044744,0.002872326],"category_scores_gemma":[0.00160538,0.0004552729,0.0004104829,0.00027186,0.0009872325,0.0009523247,0.0005259058,0.0008570623,0.0004618669],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0009425679,"about_ca_system_score_gemma":0.0004324255,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.004827096,"about_ca_topic_score_gemma":0.00372127,"domain_scores_codex":[0.9994931,0.00004307129,0.00000942897,0.0001235678,0.0002555159,0.00007518553],"domain_scores_gemma":[0.9991218,0.0005287173,0.00008941261,0.00007401638,0.0001587188,0.00002722817],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0002487151,0.00004962594,0.0016563,0.0001821087,0.00003848656,0.0003101867,0.0005587488,0.002194069,0.9830335,0.001533386,0.0003103728,0.009884684],"study_design_scores_gemma":[0.00005776154,0.0003887067,0.01433432,0.00001396687,0.0000425675,0.0004582797,0.0003198606,0.01235373,0.9680226,0.000769681,0.003190571,0.00004788107],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9773011,0.002296614,0.01550562,0.0002829689,0.00005204066,0.00006206453,0.0001244404,0.0002102802,0.004164881],"genre_scores_gemma":[0.99227,0.0006609205,0.00424182,0.00003575794,0.00001831566,0.00003160789,0.00004460456,0.00002785357,0.002669118],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.004827096,"threshold_uncertainty_score":0.009608865,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005869269263309668,"score_gpt":0.1853638797529719,"score_spread":0.1794946104896622,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}