{"id":"W2735254522","doi":"10.1109/ets.2017.7968236","title":"A phase locking test solution for MEMS devices","year":2017,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":6,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Windsor","funders":"","keywords":"Capacitance; Capacitive sensing; Microelectromechanical systems; Materials science; Electronic engineering; CMOS; Voltage; Device under test; Electrical engineering; Optoelectronics; Engineering; Physics; Electrode","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0005394066,0.0005378136,0.0003320957,0.0006959862,0.0003528523,0.0005663718,0.001130179,0.001245341,0.003332874],"category_scores_gemma":[0.002102256,0.0002341787,0.0002156034,0.0003716264,0.0004034096,0.001036764,0.0006269627,0.0008070943,0.001077943],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004321542,"about_ca_system_score_gemma":0.0004462315,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001309018,"about_ca_topic_score_gemma":0.0001825141,"domain_scores_codex":[0.9989061,0.0001466409,0.00006665879,0.0002038299,0.0006148347,0.00006187803],"domain_scores_gemma":[0.9985315,0.0004605398,0.0003487592,0.0001755598,0.0004196921,0.00006394002],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001283366,0.00006586002,0.0003981882,0.0001495597,0.00001054479,0.0001223215,0.00004984919,0.0004264257,0.9464725,0.001676333,0.0007320122,0.0497681],"study_design_scores_gemma":[0.00004249808,0.0006086771,0.0006146101,0.00002284557,0.00001406907,0.0008198913,0.00002637422,0.01073179,0.9775599,0.000698848,0.008840462,0.00001995754],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.134265,0.002416603,0.8481635,0.001329913,0.0007698023,0.0005900104,0.0002931243,0.003834108,0.008337912],"genre_scores_gemma":[0.7144972,0.0005547678,0.2744547,0.001404098,0.0002008743,0.0004625184,0.0001881153,0.0001738436,0.008063887],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.003332874,"threshold_uncertainty_score":0.01114959,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03329178648090778,"score_gpt":0.3110978679733417,"score_spread":0.2778060814924339,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}