{"id":"W2740685070","doi":"10.1116/1.4997018","title":"Electron beam lithography using fixed beam moving stage","year":2017,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":15,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"Ontario Ministry of Research and Innovation; University of Alberta","keywords":"Image stitching; Lithography; Electron-beam lithography; Optics; Maskless lithography; Laser; Materials science; Cathode ray; Next-generation lithography; Interferometry; Beam (structure); Stencil lithography; Stage (stratigraphy); Photolithography; Computer science; Optoelectronics; Resist; Electron; Nanotechnology; Physics; Geology","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001587836,0.0003882202,0.0002844884,0.0003060198,0.0002813522,0.0003378456,0.0006497054,0.0005610837,0.006183397],"category_scores_gemma":[0.0001942818,0.0004303575,0.0002309,0.0002986014,0.0002757359,0.0004467274,0.0004191425,0.0005192989,0.001925918],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002351854,"about_ca_system_score_gemma":0.0002582498,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005314213,"about_ca_topic_score_gemma":0.001415239,"domain_scores_codex":[0.9998016,0.00001098879,0.00001541761,0.00007629132,0.00007415366,0.00002171289],"domain_scores_gemma":[0.999899,0.00002635638,0.00001349974,0.00003555585,0.00001979854,0.000005808797],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003547326,0.00001745781,0.0002672019,0.0001750093,0.00001046804,0.0001836567,0.00004040451,0.0002625718,0.9753964,0.002243329,0.0009454423,0.02042266],"study_design_scores_gemma":[0.00004491872,0.0002506589,0.003154088,0.00002856507,0.00002306191,0.0009233929,0.00003167129,0.005723215,0.9469379,0.0005205146,0.04232601,0.00003609504],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"methods","genre_scores_codex":[0.3254015,0.004724184,0.6148034,0.0006850191,0.0008198354,0.0008939659,0.001941225,0.003837017,0.04689391],"genre_scores_gemma":[0.4302295,0.002429498,0.5270568,0.0002145613,0.00005777824,0.0004542888,0.0008493407,0.0001837428,0.03852454],"genre_candidate":"methods","genre_consensus":"methods","teacher_disagreement_score":0.006183397,"threshold_uncertainty_score":0.02068549,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01543869616114164,"score_gpt":0.2498368632862328,"score_spread":0.2343981671250911,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}