{"id":"W2741353833","doi":"10.1063/1.4996206","title":"Strain-driven diffusion process during silicon oxidation investigated by coupling density functional theory and activation relaxation technique","year":2017,"lang":"en","type":"article","venue":"The Journal of Chemical Physics","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":13,"is_retracted":false,"has_abstract":true,"ca_institutions":"Université de Montréal","funders":"","keywords":"Silicon; Chemical physics; Diffusion; Density functional theory; Activation energy; Relaxation (psychology); Substrate (aquarium); Oxygen; Diffusion barrier; Strain (injury); Materials science; Coupling (piping); Layer (electronics); Chemistry; Nanotechnology; Physical chemistry; Computational chemistry; Thermodynamics; Optoelectronics; Composite material; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002080905,0.0002671141,0.0002454947,0.0001835459,0.0002099127,0.0002220866,0.0004424856,0.0003670585,0.0004843793],"category_scores_gemma":[0.0002589846,0.0002017451,0.0002114861,0.0001642619,0.0003179526,0.0003626217,0.0002095985,0.0003976022,0.00005755157],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004164059,"about_ca_system_score_gemma":0.0002382303,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0016578,"about_ca_topic_score_gemma":0.001255503,"domain_scores_codex":[0.9999425,0.00000956458,0.000001767445,0.00001029183,0.00002186969,0.00001403613],"domain_scores_gemma":[0.9999156,0.00004505283,0.00001437106,0.000006558828,0.00001210264,0.000006172429],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.0002634316,0.0001355815,0.00248122,0.0003220138,0.00004629614,0.0003609997,0.0003003025,0.1192174,0.8484637,0.0185425,0.000291563,0.009574992],"study_design_scores_gemma":[0.00001870335,0.0001028037,0.00138186,0.000006401609,0.000009164252,0.00005997938,0.00003358909,0.9213877,0.0755534,0.001147207,0.0002819709,0.00001724511],"study_design_candidate":"simulation_or_modeling","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9784793,0.0004095765,0.01897665,0.0001564805,0.00001512552,0.00001556177,0.00006355449,0.00007996799,0.001803711],"genre_scores_gemma":[0.9951935,0.0002088275,0.004169645,0.00001135599,0.000002331512,0.00001281939,0.00003303592,0.000008816718,0.0003595997],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0016578,"threshold_uncertainty_score":0.003296256,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01259739202167698,"score_gpt":0.2250237087915741,"score_spread":0.2124263167698971,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}