{"id":"W2742449484","doi":"10.1109/transducers.2017.7994157","title":"A MEMS device for fracture toughness measurement of 2D nano films under TEM imaging","year":2017,"lang":"en","type":"article","venue":"","topic":"Integrated Circuits and Semiconductor Failure Analysis","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Hitachi (Canada); University of Toronto","funders":"Natural Sciences and Engineering Research Council of Canada; CMC Microsystems","keywords":"Materials science; Microelectromechanical systems; Fracture toughness; Nano-; Composite material; Toughness; Transmission electron microscopy; Thin film; Ultimate tensile strength; Fracture (geology); Scanning electron microscope; Optoelectronics; Nanotechnology","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001996989,0.0003724873,0.00029531,0.0005280902,0.0003714566,0.0002135617,0.0005374026,0.0005572331,0.00251737],"category_scores_gemma":[0.0002982836,0.0003213213,0.000171749,0.000246653,0.0001965537,0.000408847,0.0002774974,0.000531122,0.000512752],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001971006,"about_ca_system_score_gemma":0.0001561937,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003110657,"about_ca_topic_score_gemma":0.00103616,"domain_scores_codex":[0.9997647,0.00001473167,0.00001306912,0.0000590523,0.0001343729,0.0000140194],"domain_scores_gemma":[0.9997553,0.00009088934,0.00003720147,0.00003972869,0.00006008123,0.00001675676],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001128884,0.000008007321,0.0001518547,0.0000416513,0.000004344451,0.00004149917,0.00002071715,0.00004463043,0.9933077,0.0002371809,0.0003338512,0.00579725],"study_design_scores_gemma":[0.00001377118,0.0002288255,0.004550758,0.00001376398,0.00001837212,0.001031152,0.00003644806,0.007744496,0.9750642,0.0001634707,0.01109898,0.00003585053],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.4654338,0.003582336,0.5117669,0.0005208648,0.0007951084,0.0005252915,0.003099482,0.003168481,0.01110779],"genre_scores_gemma":[0.5013758,0.001214546,0.4893817,0.0002787133,0.0001422558,0.0005958775,0.0006564073,0.0001137052,0.006240912],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.00251737,"threshold_uncertainty_score":0.008421421,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02829668566414838,"score_gpt":0.248280634780575,"score_spread":0.2199839491164266,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}