{"id":"W2745098861","doi":"10.1109/marss.2017.8001945","title":"Experimental investigation of the impact of SEM chamber conditions on the contact resistance of in-situ nanoprobing","year":2017,"lang":"en","type":"article","venue":"","topic":"Integrated Circuits and Semiconductor Failure Analysis","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"McGill University","funders":"","keywords":"Scanning electron microscope; Materials science; Vacuum chamber; Contact resistance; Chamber pressure; Nanoprobe; Electrical contacts; In situ; Silicon; Silicon nanowires; Composite material; Optoelectronics; Nanotechnology; Metallurgy; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0005589331,0.0006973841,0.000557245,0.0002773315,0.0004834588,0.0003905536,0.0006526797,0.0006644825,0.002223562],"category_scores_gemma":[0.001601445,0.0004329184,0.0002093576,0.0002920305,0.0004441896,0.0005885423,0.0004787135,0.0005716997,0.0003125708],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002829088,"about_ca_system_score_gemma":0.0001939328,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004125452,"about_ca_topic_score_gemma":0.0007869371,"domain_scores_codex":[0.9989874,0.0001346166,0.00007653936,0.0002757866,0.000393063,0.0001325741],"domain_scores_gemma":[0.9976947,0.0009700448,0.0003881773,0.0004159751,0.0004528972,0.00007822097],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003354922,0.000021113,0.0001779132,0.00008087285,0.000007010623,0.00004798069,0.00005948303,0.00009411802,0.9986562,0.0000347327,0.00003979416,0.0007472564],"study_design_scores_gemma":[0.000002892923,0.000102802,0.001136524,0.000002163276,0.000007012043,0.00004718471,0.00002574434,0.0006047198,0.997677,0.00001317406,0.0003751353,0.000005671841],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.984812,0.0006200415,0.01263514,0.00009665036,0.00005914088,0.0000870952,0.0004036381,0.0002046715,0.00108156],"genre_scores_gemma":[0.9840815,0.0006082001,0.0136317,0.0000668715,0.00002770455,0.0001292977,0.0003392577,0.0001183706,0.0009970302],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002223562,"threshold_uncertainty_score":0.00743854,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02001221171218046,"score_gpt":0.2551444582932371,"score_spread":0.2351322465810567,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}