{"id":"W2745098861","doi":"10.1109/marss.2017.8001945","title":"Experimental investigation of the impact of SEM chamber conditions on the contact resistance of in-situ nanoprobing","year":2017,"lang":"en","type":"article","venue":"","topic":"Integrated Circuits and Semiconductor Failure Analysis","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"McGill University","funders":"","keywords":"Scanning electron microscope; Materials science; Vacuum chamber; Contact resistance; Chamber pressure; Nanoprobe; Electrical contacts; In situ; Silicon; Silicon nanowires; Composite material; Optoelectronics; Nanotechnology; Metallurgy; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001066946,0.00008103109,0.000162093,0.00004710813,0.00006369609,0.00001211894,0.0001633838,0.00004191973,0.0001092867],"category_scores_gemma":[0.00002884095,0.00004218756,0.0001231702,0.00008973028,0.00009256446,0.00009802779,0.00001118987,0.00009205964,0.000001117414],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00005551664,"about_ca_system_score_gemma":0.00002456805,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000604898,"about_ca_topic_score_gemma":0.0004968768,"domain_scores_codex":[0.9995093,0.00002561224,0.0002192585,0.00006442027,0.00009971152,0.00008171886],"domain_scores_gemma":[0.99937,0.00004366362,0.0001357729,0.0003839547,0.00005235094,0.00001425396],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000003183453,0.0000107563,0.003044595,0.000008635898,0.000074176,2.106771e-7,0.0009126785,0.0008758226,0.9863325,0.008291217,0.0004428308,0.000003414128],"study_design_scores_gemma":[0.0001232254,0.00001887651,0.04239992,0.0001195539,0.00001136215,3.540714e-7,0.0005666331,0.0004258025,0.9560819,0.0002013189,0.000004645612,0.00004643837],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9761425,0.00003983704,0.000004292232,0.00005185227,0.00004012,0.00009999614,0.00001550208,0.000007066578,0.02359884],"genre_scores_gemma":[0.9997903,0.000003267668,0.00000639673,0.000009816766,0.000007723215,0.000005897152,0.000003342933,0.000007642146,0.000165671],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.03935532,"threshold_uncertainty_score":0.1720359,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02001221171218046,"score_gpt":0.2551444582932371,"score_spread":0.2351322465810567,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}