{"id":"W2746228974","doi":"10.1149/ma2005-01/8/391","title":"Technology and Reliability Challenges of Sub-nm High EOT High-k/ Metal Gate Electrode Transistors","year":2006,"lang":"en","type":"article","venue":"ECS Meeting Abstracts","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Infineon Technologies (Canada)","funders":"","keywords":"Materials science; Optoelectronics; Metal gate; Reliability (semiconductor); Electrode; High-κ dielectric; Transistor; Electrical engineering; Gate oxide; Engineering; Voltage; Chemistry; Dielectric; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003326092,0.0001888188,0.00033935,0.0001485627,0.0000406657,0.00001616144,0.0001067471,0.0001761097,0.000009230156],"category_scores_gemma":[0.00005822213,0.0001838169,0.00003708479,0.0001249713,0.00008009561,0.00009282598,0.0000150427,0.0001465671,0.000005526038],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00003040338,"about_ca_system_score_gemma":0.00001055049,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005102882,"about_ca_topic_score_gemma":0.00008960312,"domain_scores_codex":[0.9989035,0.0000226882,0.0004081347,0.000249852,0.0001241464,0.0002916705],"domain_scores_gemma":[0.9995164,0.00008493267,0.00009661989,0.0002167275,0.00004518399,0.00004018297],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000008904005,0.0000295004,0.0002297145,0.0002468765,0.00002063307,0.000004643666,0.00004953581,0.02259136,0.9763189,0.0003075224,0.00004159612,0.0001508099],"study_design_scores_gemma":[0.0002172322,0.00004221251,0.0256959,0.00005591694,0.00003471585,0.000008636975,0.00004181638,0.00009318428,0.9704012,0.002668968,0.0005541687,0.000186024],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9908778,0.00410695,0.000001535079,0.0001929846,0.0004614289,0.00009097568,0.0000110015,0.0003577048,0.00389964],"genre_scores_gemma":[0.9987154,0.0002954011,0.0008086264,0.000003642994,0.0001194085,0.00000793039,0.000006296655,0.00003447278,0.000008820425],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.02546619,"threshold_uncertainty_score":0.7495834,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006829319719468501,"score_gpt":0.1887208076993004,"score_spread":0.1818914879798319,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}