{"id":"W2750702544","doi":"10.1117/12.2283869","title":"Femtosecond micromachining of glass and semiconductor materials","year":2017,"lang":"en","type":"article","venue":"","topic":"Laser Material Processing Techniques","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"","keywords":"Surface micromachining; Materials science; Laser beam machining; Laser; Laser ablation; Soda-lime glass; Laser drilling; Substrate (aquarium); Tungsten; Optoelectronics; Machining; Excimer laser; Optics; Femtosecond; Micrometer; Composite material; Metallurgy; Fabrication; Drilling","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009805492,0.00008229355,0.000149934,0.00002477135,0.0000613077,0.000148863,0.0001668558,0.00005029472,0.0001686756],"category_scores_gemma":[0.0000210218,0.00007253177,0.000008774496,0.000006296342,0.00005791444,0.000229575,0.00007706907,0.00002898652,0.000004076185],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000006776057,"about_ca_system_score_gemma":0.000004274232,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00005881855,"about_ca_topic_score_gemma":0.000005409252,"domain_scores_codex":[0.999642,0.000005419983,0.000139028,0.00008288555,0.00003419983,0.00009645486],"domain_scores_gemma":[0.9996593,0.000007965074,0.00005016176,0.0002444652,0.00001318292,0.00002495033],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000002318005,0.000001822805,0.0002637409,0.0001425315,0.000008585985,8.709468e-7,0.00005605053,3.373663e-7,0.9982966,0.0002008832,0.0004296856,0.0005966048],"study_design_scores_gemma":[0.0001011955,0.000009342023,0.001774122,0.00004224186,0.00000478897,0.000005246261,0.000007052017,0.00006909925,0.9967415,0.0008083031,0.0003485989,0.00008849983],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9940739,0.00004626549,0.0001003054,0.00001988349,0.0002389999,0.00005096935,0.00001964397,0.0002704388,0.005179653],"genre_scores_gemma":[0.9955683,0.0000161487,0.00422526,0.0000101546,0.00004471769,0.000003401839,0.000002267645,0.00002031321,0.0001094431],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00507021,"threshold_uncertainty_score":0.295776,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01240082366613066,"score_gpt":0.2354621246757759,"score_spread":0.2230613010096453,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}