{"id":"W2750702544","doi":"10.1117/12.2283869","title":"Femtosecond micromachining of glass and semiconductor materials","year":2017,"lang":"en","type":"article","venue":"","topic":"Laser Material Processing Techniques","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"","keywords":"Surface micromachining; Materials science; Laser beam machining; Laser; Laser ablation; Soda-lime glass; Laser drilling; Substrate (aquarium); Tungsten; Optoelectronics; Machining; Excimer laser; Optics; Femtosecond; Micrometer; Composite material; Metallurgy; Fabrication; Drilling","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001893697,0.0002024741,0.0002128881,0.0002831452,0.000239592,0.0002087059,0.0002356154,0.000184848,0.002399138],"category_scores_gemma":[0.0003403943,0.0001836655,0.0001904309,0.0003168345,0.0002772456,0.0002345487,0.0001984209,0.0003284966,0.0003291436],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005702043,"about_ca_system_score_gemma":0.0004983998,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.002768507,"about_ca_topic_score_gemma":0.005732451,"domain_scores_codex":[0.999846,0.000006669316,0.000008321276,0.00003382181,0.00007644123,0.00002875662],"domain_scores_gemma":[0.9998401,0.00004377961,0.00002975354,0.00003463054,0.00003974101,0.00001190762],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002285298,0.000004759093,0.0002355956,0.00007270394,0.000003748609,0.00004173177,0.00005373285,0.0002901199,0.9877332,0.0006350368,0.0001682304,0.01073829],"study_design_scores_gemma":[0.000004346527,0.00009597944,0.00380158,0.000006966719,0.000004537206,0.0001731298,0.00003480125,0.0009596764,0.9875174,0.0001920236,0.007202005,0.000007535521],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8973408,0.006366367,0.07962971,0.0002630942,0.0003577514,0.0002334598,0.0006717268,0.001017133,0.01412],"genre_scores_gemma":[0.8871769,0.002097111,0.09872412,0.00007472943,0.00003243491,0.0001169774,0.0004413525,0.0001096495,0.01122671],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002768507,"threshold_uncertainty_score":0.008025944,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01240082366613066,"score_gpt":0.2354621246757759,"score_spread":0.2230613010096453,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}