{"id":"W2751726895","doi":"10.1117/12.2283837","title":"Novel ion implantation based method for surface patterning","year":2017,"lang":"en","type":"article","venue":"","topic":"Photonic Crystals and Applications","field":"Physics and Astronomy","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Western University","funders":"","keywords":"Materials science; Photonic crystal; Photonics; Fabrication; Lithography; Etching (microfabrication); Photonic integrated circuit; Focused ion beam; Ion implantation; Optoelectronics; Refractive index; Ion beam; Nanotechnology; Electron-beam lithography; Electronic circuit; Photolithography; Reactive-ion etching; Ion; Resist; Chemistry; Electrical engineering; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001055729,0.00005366562,0.00006418922,0.000006180362,0.0003340215,0.00008981623,0.0001076575,0.00001208402,0.0001776099],"category_scores_gemma":[0.000001795558,0.00004780278,0.00004722056,0.000008839997,0.000007388457,0.00007137362,0.00001595807,0.0000281449,0.000007015266],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000004567104,"about_ca_system_score_gemma":0.00002012113,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007338323,"about_ca_topic_score_gemma":0.00001609061,"domain_scores_codex":[0.9996635,0.000003712379,0.00007757154,0.0001205278,0.00003650642,0.00009815927],"domain_scores_gemma":[0.999571,0.00006273993,0.00009152201,0.0002195827,0.00002839563,0.00002675176],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001479628,0.0001337348,0.01047315,0.00001566015,0.00003682308,5.367077e-8,0.00007270191,0.001178099,0.8851823,0.06208627,0.0009701686,0.03983622],"study_design_scores_gemma":[0.002846709,0.00004221056,0.02862841,0.00003020923,0.0000762959,8.178064e-7,0.0003138912,0.3720177,0.5498927,0.008334229,0.03738521,0.0004316263],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.106433,8.256874e-7,0.8862218,0.0003254288,0.00003630448,0.0001782686,0.0001268488,0.00001322783,0.006664348],"genre_scores_gemma":[0.9054782,6.860164e-8,0.09386485,0.00004314011,0.00007010093,0.00004602072,0.00008429955,0.000006643536,0.0004066127],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.7990453,"threshold_uncertainty_score":0.2569058,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03328117189035663,"score_gpt":0.3512932056909811,"score_spread":0.3180120338006245,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}