{"id":"W2751822787","doi":"","title":"A single-chip scanning probe microscope array","year":2017,"lang":"en","type":"article","venue":"IEEE Conference Proceedings","topic":"Force Microscopy Techniques and Applications","field":"Physics and Astronomy","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Cantilever; Chip; Fabrication; Metrology; Microscope; Microelectromechanical systems; Materials science; Atomic force microscopy; Scanning probe microscopy; Nanotechnology; Instrumentation (computer programming); Characterization (materials science); CMOS; Optoelectronics; Optics; Computer science; Engineering; Electrical engineering; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001063304,0.0002151084,0.0002063545,0.00004307796,0.0008047535,0.0009691761,0.0006965764,0.00005873713,0.0002262002],"category_scores_gemma":[0.000009103845,0.0002083584,0.00007953573,0.00005764521,0.0002167069,0.0004215257,0.00007845456,0.0002230233,0.00008323301],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00002480545,"about_ca_system_score_gemma":0.00006672263,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001998968,"about_ca_topic_score_gemma":0.00000206331,"domain_scores_codex":[0.998902,0.00000214072,0.0002138759,0.0003939659,0.0001142868,0.0003737461],"domain_scores_gemma":[0.9990278,0.000006696735,0.0003008581,0.0003100155,0.000243841,0.0001107749],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000005331444,0.00006522455,0.02169436,0.00001742562,0.0000127717,1.378002e-7,0.0004827981,8.5401e-8,0.9427875,0.02807776,0.002146344,0.004710271],"study_design_scores_gemma":[0.0002211497,0.00005752935,0.001170605,0.000179172,0.00002009344,0.000001707696,0.0002983541,0.00007830741,0.9631436,0.01348753,0.02102047,0.0003214453],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7530758,0.00001329062,0.07524456,0.000940568,0.0001653228,0.0006035055,0.00003415927,0.0002134721,0.1697094],"genre_scores_gemma":[0.9826988,0.000001718748,0.01406162,0.0000603941,0.0002709438,0.0001923626,0.000006923734,0.00002934185,0.002677909],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.229623,"threshold_uncertainty_score":0.9345787,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03473049402444574,"score_gpt":0.295687270026567,"score_spread":0.2609567760021213,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}