{"id":"W2752022176","doi":"10.1109/ted.2017.2746006","title":"Design and Fabrication of a High-Power Air-Coupled Capacitive Micromachined Ultrasonic Transducer Array With Concentric Annular Cells","year":2017,"lang":"en","type":"article","venue":"IEEE Transactions on Electron Devices","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":15,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"Natural Sciences and Engineering Research Council of Canada; CMC Microsystems","keywords":"Capacitive micromachined ultrasonic transducers; Ultrasonic sensor; Capacitive sensing; Transducer; Materials science; Acoustics; Surface micromachining; Electrical engineering; Optoelectronics; Optics; Fabrication; Engineering; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00006367436,0.0002133868,0.0002548116,0.0001003973,0.0002137256,0.00002652053,0.0001760703,0.0001087317,0.00001412757],"category_scores_gemma":[0.000002446314,0.0001831546,0.00003936868,0.0001262238,0.0001550718,0.00029489,3.234811e-7,0.0002560677,0.000003027766],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00005838617,"about_ca_system_score_gemma":0.00002258043,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00007189493,"about_ca_topic_score_gemma":0.00009127009,"domain_scores_codex":[0.9991903,0.00001136121,0.000167345,0.0002364075,0.0001166798,0.0002778934],"domain_scores_gemma":[0.999396,0.0000781319,0.00009586322,0.0003234409,0.00006354532,0.0000430388],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00008972597,0.00004912005,0.000009328607,0.00003700907,0.0001121833,0.00000168615,0.0002805734,0.02685895,0.9702514,0.00001628772,0.000004727928,0.002289049],"study_design_scores_gemma":[0.00068461,0.0003750047,0.001011917,0.00005026504,0.00007257466,0.000006779983,0.0000720479,0.001271893,0.9960892,0.00007496509,0.00007507449,0.0002157146],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.5207639,0.0002380269,0.4785078,0.00003771808,0.0000594077,0.0002190724,0.00001005788,0.0001397689,0.00002419792],"genre_scores_gemma":[0.9934033,0.0006569442,0.005789055,0.00001251325,0.000007861272,0.0000587049,0.000001335457,0.00003440243,0.0000359054],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.4727188,"threshold_uncertainty_score":0.746883,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005950127306795173,"score_gpt":0.2089182428895269,"score_spread":0.2029681155827318,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}