{"id":"W2755307068","doi":"10.31399/asm.cp.istfa2017p0574","title":"Precision Xe Plasma FIB Delayering for Physical Failure Analysis of Sub-20 nm Microprocessor Devices","year":2017,"lang":"en","type":"article","venue":"Proceedings - International Symposium for Testing and Failure Analysis","topic":"Integrated Circuits and Semiconductor Failure Analysis","field":"Engineering","cited_by":10,"is_retracted":false,"has_abstract":true,"ca_institutions":"Advanced Micro Devices (Canada)","funders":"","keywords":"Polishing; Materials science; Chemical-mechanical planarization; Plasma; Planar; Dielectric; Microprocessor; Optoelectronics; Porosity; Nanotechnology; Computer science; Composite material; Embedded system; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0003913455,0.0004496966,0.001034499,0.001035238,0.000554953,0.0006927053,0.0008050852,0.0002138095,0.00001479567],"category_scores_gemma":[0.0006000844,0.0004099614,0.000924329,0.001276292,0.0001103818,0.0007329933,0.00008908984,0.0002252766,0.000001495517],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00009783747,"about_ca_system_score_gemma":0.0000221519,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001513232,"about_ca_topic_score_gemma":0.0007743778,"domain_scores_codex":[0.9976959,0.000006043898,0.0007213533,0.0007051975,0.0004221851,0.0004493623],"domain_scores_gemma":[0.9969144,0.0004081288,0.0006246538,0.0002821304,0.001622573,0.0001480807],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.0001257438,0.0001569232,0.1125487,0.0005695389,0.0431601,0.000001969892,0.001533022,0.04686181,0.7866785,0.00128788,0.0009997012,0.006076118],"study_design_scores_gemma":[0.0005954537,0.0001271406,0.002084082,0.0001237684,0.01934893,0.000005200869,0.0004489759,0.9157141,0.05788129,0.0003461761,0.00274128,0.0005835763],"study_design_candidate":"simulation_or_modeling","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9906293,0.00008790704,0.006882761,0.0005307827,0.0001160768,0.0003238142,0.0004291042,0.0001669088,0.0008333826],"genre_scores_gemma":[0.9917093,0.00002785997,0.00730822,0.00002132066,0.0003219398,0.0001477423,0.0002673424,0.00005734371,0.0001389219],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.8688523,"threshold_uncertainty_score":0.9998353,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01503492770299855,"score_gpt":0.2524067199841974,"score_spread":0.2373717922811989,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}