{"id":"W2756368836","doi":"10.4071/2017dpc-tha1_presentation1","title":"Plasmon Rulers for 3D IC Alignment","year":2017,"lang":"en","type":"article","venue":"Additional Conferences (Device Packaging HiTEC HiTEN & CICMT)","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":false,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Plasmon; Nanotechnology; Materials science; Optoelectronics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003812578,0.0006185967,0.0005000255,0.0005824896,0.000564636,0.00105169,0.0008094616,0.0005968254,0.009825874],"category_scores_gemma":[0.0004984,0.0005040359,0.0004208351,0.0004742988,0.0004418192,0.0007514642,0.0008717959,0.0009572461,0.003568683],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004366183,"about_ca_system_score_gemma":0.0002900906,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002653173,"about_ca_topic_score_gemma":0.0009914549,"domain_scores_codex":[0.9994695,0.0000485917,0.00003785401,0.000115994,0.000267234,0.0000608521],"domain_scores_gemma":[0.9994439,0.00008617453,0.00008934784,0.0002637179,0.00008354919,0.00003326122],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001519679,0.00009062036,0.0003777557,0.0002368878,0.00002161316,0.0002352229,0.0001522691,0.002725007,0.8530437,0.02935101,0.01086877,0.1027451],"study_design_scores_gemma":[0.00003588801,0.0002973392,0.001247,0.00003370707,0.00001974246,0.0004683739,0.00007092677,0.01477347,0.8935452,0.003635149,0.08581568,0.00005753424],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.2491474,0.00475815,0.5527397,0.00109412,0.004080973,0.0004350521,0.001447579,0.01020312,0.176094],"genre_scores_gemma":[0.6058682,0.001477565,0.3195782,0.000377441,0.0001906637,0.0002761072,0.0010021,0.00105117,0.07017846],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.009825874,"threshold_uncertainty_score":0.03287089,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02746928339931395,"score_gpt":0.2698458820778556,"score_spread":0.2423765986785417,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}