{"id":"W2756368836","doi":"10.4071/2017dpc-tha1_presentation1","title":"Plasmon Rulers for 3D IC Alignment","year":2017,"lang":"en","type":"article","venue":"Additional Conferences (Device Packaging HiTEC HiTEN & CICMT)","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":false,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Plasmon; Nanotechnology; Materials science; Optoelectronics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow","insufficient_payload"],"consensus_categories":[],"category_scores_codex":[0.0002006175,0.0003080097,0.0002877843,0.000233752,0.0005877133,0.0003453752,0.0006184833,0.00013075,0.002488299],"category_scores_gemma":[0.00008308618,0.0003139257,0.0001795752,0.0001113768,0.0001773018,0.0003802137,0.00005531355,0.0001829488,0.0001087747],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00007726785,"about_ca_system_score_gemma":0.00006805566,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00004781256,"about_ca_topic_score_gemma":0.00003832577,"domain_scores_codex":[0.9984676,0.00002499353,0.0003592687,0.0003827179,0.0003470078,0.0004184505],"domain_scores_gemma":[0.9986655,0.0002224485,0.000183619,0.0005839707,0.0001835109,0.0001610185],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"not_applicable","study_design_gemma":"not_applicable","study_design_scores_codex":[0.0001158422,0.0003453096,0.01293958,0.0008944516,0.001134177,0.00003720712,0.001376296,0.0004901151,0.008994845,0.1168439,0.5249743,0.3318539],"study_design_scores_gemma":[0.0006537072,0.00008797635,0.02420153,0.0003362892,0.00008144762,0.0000168763,0.0002206995,0.008799687,0.003919472,0.005286096,0.9555876,0.0008086102],"study_design_candidate":"not_applicable","study_design_consensus":"not_applicable","genre_codex":"other","genre_gemma":"empirical","genre_scores_codex":[0.09401241,0.002011488,0.256215,0.0102022,0.004024246,0.005239931,0.03300376,0.009679789,0.5856112],"genre_scores_gemma":[0.9763859,0.00009683771,0.02004994,0.0003017547,0.0002395749,0.0005686742,0.001776498,0.00005680581,0.000524014],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.8823735,"threshold_uncertainty_score":0.9999313,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02746928339931395,"score_gpt":0.2698458820778556,"score_spread":0.2423765986785417,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}