{"id":"W2758510945","doi":"10.31399/asm.cp.istfa2017p0265","title":"Practicality of Single Microscope Failure Analysis for Fault Isolation, Analysis, and Advanced TEM Sample Preparation by the Integration EBAC and EDS on FIBSEM","year":2017,"lang":"en","type":"article","venue":"Proceedings - International Symposium for Testing and Failure Analysis","topic":"Integrated Circuits and Semiconductor Failure Analysis","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Oxford Instruments (Canada)","funders":"","keywords":"Fault detection and isolation; Detector; Computer science; Lamella (surface anatomy); Materials science; Workflow; Actuator; Artificial intelligence; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.003055107,0.0007406821,0.0006150843,0.00092339,0.0006761537,0.00124986,0.0008417809,0.0007583871,0.004498207],"category_scores_gemma":[0.003386333,0.0007240929,0.000314854,0.0003178498,0.0007172009,0.001771604,0.001126737,0.0009709834,0.0017492],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003744224,"about_ca_system_score_gemma":0.000648762,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004382763,"about_ca_topic_score_gemma":0.00154735,"domain_scores_codex":[0.998745,0.0002423752,0.00009349058,0.0002988847,0.0005390745,0.00008120218],"domain_scores_gemma":[0.9942889,0.002751149,0.0003246378,0.001595863,0.0009077945,0.00013164],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001141754,0.00004835728,0.002567563,0.0002700266,0.00003294961,0.0002540617,0.0001446195,0.001372997,0.9461976,0.001315146,0.0006985148,0.046984],"study_design_scores_gemma":[0.00002671079,0.000585446,0.01194786,0.00008518655,0.00005608012,0.002827357,0.0003608933,0.02850703,0.9390355,0.002685474,0.01380801,0.00007439859],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"methods","genre_scores_codex":[0.3216847,0.002094916,0.6657585,0.000890577,0.0001602741,0.0002644198,0.0003797245,0.003903236,0.004863672],"genre_scores_gemma":[0.3755707,0.0009863811,0.619313,0.0001784973,0.00006410392,0.0002591099,0.0004573576,0.0005455192,0.002625168],"genre_candidate":"methods","genre_consensus":"methods","teacher_disagreement_score":0.004498207,"threshold_uncertainty_score":0.01615715,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01823347630736324,"score_gpt":0.2752578353781396,"score_spread":0.2570243590707764,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}