{"id":"W2767337205","doi":"10.1116/1.4998561","title":"Oxidation sharpening of silicon tips in the atmospheric environment","year":2017,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"Integrated Circuits and Semiconductor Failure Analysis","field":"Engineering","cited_by":11,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Thermal oxidation; Silicon; Wafer; Materials science; Microelectronics; Nanotechnology; Sharpening; Oxide; Glovebox; Optoelectronics; Chemistry; Metallurgy; Computer science","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.001975331,0.0001604319,0.0003479393,0.0003219174,0.0003928271,0.0001328855,0.0007315903,0.0001944787,0.000006329],"category_scores_gemma":[0.00006407548,0.0001138162,0.00002385219,0.00034186,0.0008118098,0.0003800055,0.00006448666,0.0003466285,4.379601e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001272573,"about_ca_system_score_gemma":0.0001171726,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000005387133,"about_ca_topic_score_gemma":0.000007886235,"domain_scores_codex":[0.9987324,0.00002156291,0.0004769981,0.0001876471,0.0002466884,0.0003347037],"domain_scores_gemma":[0.9990922,0.000007801694,0.0004724437,0.0002645404,0.0001400901,0.00002294736],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001137708,0.00002260078,0.0004743052,0.00004250497,0.00002478506,0.000002470121,0.0002474923,0.00001847657,0.9750286,0.001148481,0.000003442095,0.02297546],"study_design_scores_gemma":[0.0004092371,0.0002362426,0.0005598539,0.0001446022,0.00007175819,0.0001389617,0.0004803415,0.0003086173,0.9917454,0.005257164,0.0005039223,0.0001439454],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.992987,0.005559429,0.0005687644,0.0006418491,0.00007897521,0.0001005395,8.713691e-7,0.00002242483,0.00004017201],"genre_scores_gemma":[0.997993,0.001651501,0.0003038975,0.00001459204,0.00001897293,0.000005829959,3.849399e-7,0.00000914619,0.000002693081],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.02283151,"threshold_uncertainty_score":0.4641292,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01178392168366109,"score_gpt":0.2092717998557042,"score_spread":0.1974878781720432,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}