{"id":"W2768768506","doi":"10.1007/978-981-10-4819-7_12","title":"Ferroelectric (Hf, Zr)O2 Thin Films for High-Density Nonvolatile Memories","year":2017,"lang":"en","type":"book-chapter","venue":"","topic":"Ferroelectric and Negative Capacitance Devices","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":false,"ca_institutions":"Institut National de la Recherche Scientifique","funders":"","keywords":"Materials science; Ferroelectricity; Ferroelectric RAM; Thin film; Optoelectronics; Non-volatile memory; Hafnium; Sputter deposition; Tin; Surface roughness; Sputtering; Dielectric; Zirconium; Nanotechnology; Composite material; Metallurgy","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00006091625,0.0005280542,0.0002006599,0.0002770765,0.0001720696,0.0005697808,0.0004930722,0.000315807,0.007508388],"category_scores_gemma":[0.00008277209,0.0001520213,0.000128453,0.000394525,0.0001314441,0.0008626008,0.000246641,0.0005029727,0.001771728],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002133201,"about_ca_system_score_gemma":0.0001283885,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000447531,"about_ca_topic_score_gemma":0.001443183,"domain_scores_codex":[0.9999627,0.000002205458,0.000001456587,0.00000710925,0.00002039366,0.000006223737],"domain_scores_gemma":[0.9999843,0.000006423399,0.000001784544,0.000002034215,0.000004046248,0.00000147793],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000117663,0.00009324079,0.0001483868,0.002207711,0.0000372734,0.0004501936,0.0001586108,0.000959461,0.3578693,0.06667456,0.07326888,0.4980147],"study_design_scores_gemma":[0.00002332457,0.0001047009,0.0007281259,0.000287133,0.00003975112,0.001285256,0.0001131046,0.002540073,0.1986275,0.01173782,0.7844893,0.00002388102],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"other","genre_gemma":"empirical","genre_scores_codex":[0.0671606,0.4006695,0.03307347,0.002762342,0.005181301,0.0001013301,0.0007321925,0.0006898138,0.4896294],"genre_scores_gemma":[0.2231661,0.1812486,0.01852735,0.0008697176,0.001405536,0.00005392878,0.00073987,0.0003018495,0.573687],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.007508388,"threshold_uncertainty_score":0.02511811,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01719781107255823,"score_gpt":0.2136187487611869,"score_spread":0.1964209376886287,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}