{"id":"W2770596809","doi":"10.1116/1.5010814","title":"Batch fabrication of AFM probes with direct positioning capability","year":2017,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"Force Microscopy Techniques and Applications","field":"Physics and Astronomy","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Cantilever; Wafer; Shadow mask; Fabrication; Pyramid (geometry); Etching (microfabrication); Materials science; Optics; Atomic force microscopy; Nanotechnology; Optoelectronics; Silicon; Scanning probe microscopy; Layer (electronics); Physics; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000559787,0.000708181,0.0007101822,0.000486862,0.0004321043,0.000554226,0.001549921,0.0009817043,0.004822091],"category_scores_gemma":[0.001062707,0.0009646399,0.0004975164,0.0003683452,0.0003386434,0.0006868941,0.0005919326,0.001400339,0.005338699],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004101058,"about_ca_system_score_gemma":0.0004004452,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007066072,"about_ca_topic_score_gemma":0.001455263,"domain_scores_codex":[0.9992919,0.00003021368,0.00005037623,0.0002499162,0.0003189321,0.00005864938],"domain_scores_gemma":[0.9991147,0.0001756426,0.00009024414,0.0003335108,0.0002332966,0.00005257878],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002880562,0.00001882344,0.0001076706,0.0001199946,0.000008871439,0.0000559879,0.00002819671,0.0002069271,0.9921212,0.0003714818,0.0009962606,0.005935819],"study_design_scores_gemma":[0.00002394504,0.0002208985,0.001147481,0.00001233817,0.00002449479,0.0002832886,0.00002014276,0.004327002,0.9731141,0.0002318485,0.02054965,0.00004482508],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.2625529,0.002256487,0.6913496,0.0005709418,0.001289609,0.002221826,0.006635392,0.01343798,0.01968522],"genre_scores_gemma":[0.2057065,0.001069783,0.774833,0.0002443316,0.0001442845,0.00217608,0.003676143,0.0005480642,0.01160186],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.004822091,"threshold_uncertainty_score":0.01613152,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0090376903416665,"score_gpt":0.2516151071156438,"score_spread":0.2425774167739773,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}