{"id":"W2779500826","doi":"10.1109/naecon.2017.8268754","title":"Design and analysis of wafer-level vacuum-encapsulated disk resonator gyroscope using a commercial MEMS process","year":2017,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":6,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Windsor","funders":"","keywords":"Gyroscope; Resonator; Wafer; Microelectromechanical systems; Materials science; Optoelectronics; Vibrating structure gyroscope; Q factor; Electronic engineering; Acoustics; Engineering; Physics; Aerospace engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002350421,0.0004253669,0.0005071418,0.0002024475,0.0002387488,0.0004748927,0.0007520255,0.0004509524,0.0009626683],"category_scores_gemma":[0.0004803815,0.0002269293,0.0002834201,0.0001283804,0.0001823285,0.0002829201,0.000159109,0.0001624547,0.0004118373],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0006595743,"about_ca_system_score_gemma":0.0005656389,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00141552,"about_ca_topic_score_gemma":0.00135395,"domain_scores_codex":[0.9995381,0.0000371438,0.00001730201,0.0001113647,0.0002535245,0.00004261491],"domain_scores_gemma":[0.9997166,0.00005855675,0.00007357975,0.00003562244,0.00009930268,0.00001646083],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001251039,0.00002530213,0.001895168,0.0002236926,0.00004103831,0.0002717797,0.00009348668,0.004173305,0.9795211,0.0008959811,0.0004850996,0.01224909],"study_design_scores_gemma":[0.00007332316,0.001372555,0.01033416,0.00001895071,0.00009641116,0.0007758748,0.00008078558,0.06497874,0.908971,0.0001524983,0.01310121,0.00004445341],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8113216,0.002320614,0.1726713,0.0003943844,0.0001152857,0.0004112422,0.0005745775,0.002720214,0.009470806],"genre_scores_gemma":[0.9266034,0.0002942409,0.06996036,0.00004736925,0.00002353784,0.0001227484,0.0002176759,0.0001128065,0.002617933],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00141552,"threshold_uncertainty_score":0.004785538,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.07201069018789494,"score_gpt":0.3188705122099733,"score_spread":0.2468598220220783,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}