{"id":"W2784020090","doi":"10.1149/2.0151802jss","title":"Influence of Deposition Conditions on the Characteristics of Luminescent Silicon Carbonitride Thin Films","year":2018,"lang":"en","type":"article","venue":"ECS Journal of Solid State Science and Technology","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":21,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"Fundo de Apoio ao Ensino, à Pesquisa e Extensão, Universidade Estadual de Campinas; Coordenação de Aperfeiçoamento de Pessoal de Nível Superior","keywords":"Materials science; Elastic recoil detection; Thin film; X-ray photoelectron spectroscopy; Analytical Chemistry (journal); Substrate (aquarium); Ellipsometry; Photoluminescence; Rutherford backscattering spectrometry; Fourier transform infrared spectroscopy; Silicon; Plasma-enhanced chemical vapor deposition; Amorphous solid; Crystallography; Optoelectronics; Optics; Nuclear magnetic resonance; Nanotechnology; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002258432,0.0003329894,0.0002904177,0.0002467391,0.0002182835,0.0003836991,0.0002496504,0.0002837135,0.0008588728],"category_scores_gemma":[0.0004934224,0.000250488,0.0001199975,0.0002442456,0.0001648629,0.0002056483,0.0001282694,0.0002917208,0.0001570696],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003004691,"about_ca_system_score_gemma":0.0001814956,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001195455,"about_ca_topic_score_gemma":0.001829125,"domain_scores_codex":[0.9998259,0.00001634052,0.00001518272,0.00004838743,0.00006366337,0.00003067397],"domain_scores_gemma":[0.9996316,0.0001839138,0.00005667444,0.0000244547,0.00007993666,0.00002334014],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004133714,0.000005905767,0.000232963,0.00004882649,0.000004477592,0.00005618094,0.00001912159,0.00008523779,0.9989287,0.00001842751,0.00001606123,0.0005426105],"study_design_scores_gemma":[0.000005333742,0.0000580069,0.002938436,0.00000420189,0.000007435895,0.00006923964,0.00001916856,0.000557731,0.9960397,0.00000783936,0.0002896334,0.000003137917],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9973385,0.0007850788,0.0007682401,0.00002774558,0.00001027434,0.0000152758,0.0002340465,0.00003485761,0.0007860691],"genre_scores_gemma":[0.9958993,0.000811882,0.002146132,0.00002152658,0.000008053657,0.000038866,0.000336784,0.00004352993,0.0006939049],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001195455,"threshold_uncertainty_score":0.002873242,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006837134643677718,"score_gpt":0.2283650420742607,"score_spread":0.221527907430583,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}