{"id":"W2786660273","doi":"10.1063/1.5000362","title":"Effect of dual-dielectric hydrogen-diffusion barrier layers on the performance of low-temperature processed transparent InGaZnO thin-film transistors","year":2018,"lang":"en","type":"article","venue":"Applied Physics Letters","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":15,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"Canadian Network for Research and Innovation in Machining Technology, Natural Sciences and Engineering Research Council of Canada","keywords":"Materials science; Plasma-enhanced chemical vapor deposition; Thin-film transistor; Passivation; Gate dielectric; Optoelectronics; Dielectric; Thin film; Chemical vapor deposition; Layer (electronics); Nanotechnology; Transistor; Electrical engineering","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0002099315,0.000395527,0.0004517726,0.0001170988,0.0001300648,0.00001406238,0.0004186257,0.0001749628,0.00001149358],"category_scores_gemma":[0.00000858696,0.0002930015,0.0001560237,0.00068941,0.000320569,0.00009652608,0.00001226501,0.0005377161,0.00001101561],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00008128706,"about_ca_system_score_gemma":0.00001875494,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00000427543,"about_ca_topic_score_gemma":0.000002248906,"domain_scores_codex":[0.9985241,0.00003994385,0.0003443425,0.0003034387,0.0004123823,0.0003757681],"domain_scores_gemma":[0.9991261,0.0001748178,0.00009681657,0.0005215195,0.00003695305,0.0000437972],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001774309,0.00003887805,0.00004137074,0.0007058074,0.0001070105,9.31453e-7,0.0019283,0.04143584,0.9540331,0.0002298055,0.0003059838,0.0009955253],"study_design_scores_gemma":[0.0006048756,0.0003269384,0.0001333962,0.0001262685,0.00007544317,7.522783e-7,0.00004407179,0.004395001,0.9939103,0.00001073605,0.00008974394,0.0002824605],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9979931,0.00007027577,0.0001959912,0.000129314,0.0001661235,0.0006023687,0.00001832903,0.0003730691,0.0004514708],"genre_scores_gemma":[0.9994118,0.00003370073,0.00004725868,0.0002213901,0.00009070637,0.0001033189,0.00001146162,0.00007657151,0.000003791075],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.03987719,"threshold_uncertainty_score":0.9999522,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005063521067946383,"score_gpt":0.1845815758198747,"score_spread":0.1795180547519283,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}