{"id":"W2787953151","doi":"10.1116/1.5019673","title":"Downstream etching of silicon nitride using continuous-wave and pulsed remote plasma sources sustained in Ar/NF3/O2 mixtures","year":2018,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Plasma Diagnostics and Applications","field":"Engineering","cited_by":32,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"Fusion Energy Sciences; Samsung; Nova Scotia Department of Energy; Energy Foundation; U.S. Department of Energy","keywords":"Wafer; Plasma; Silicon nitride; Silicon; Remote plasma; Chemistry; Analytical Chemistry (journal); Plasma etching; Dissociation (chemistry); Etching (microfabrication); Reactive-ion etching; Inductively coupled plasma; Materials science; Optoelectronics; Chemical vapor deposition; Layer (electronics); Physical chemistry; Environmental chemistry","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0006952072,0.000198923,0.0004428107,0.0009975506,0.0002135727,0.00007975705,0.0003361706,0.000202856,0.000007312557],"category_scores_gemma":[0.0002156198,0.0001682594,0.00004399882,0.001194719,0.0009879483,0.0002920346,0.0001263453,0.0004122281,7.565047e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00004028834,"about_ca_system_score_gemma":0.00009369163,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00003867401,"about_ca_topic_score_gemma":0.00003486466,"domain_scores_codex":[0.9985362,0.00001594177,0.0005693813,0.0002392796,0.0002251535,0.0004139899],"domain_scores_gemma":[0.9989848,0.0001789009,0.0002946232,0.0001966827,0.0002318891,0.0001131769],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003718967,0.00005494867,0.01320432,0.0000445944,0.00003921007,0.00003868911,0.0006704661,0.003276912,0.9769244,0.0006109019,0.00005032145,0.005048005],"study_design_scores_gemma":[0.001166101,0.0003936742,0.007114141,0.0003062117,0.0000612431,0.0005313134,0.003247115,0.3551853,0.6270218,0.004358366,0.0002737586,0.0003410255],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9978525,0.0007311029,0.000510149,0.000453852,0.0001235489,0.0001413566,0.00001431187,0.00004520413,0.0001279671],"genre_scores_gemma":[0.992084,0.0005319,0.007314735,0.00001462501,0.00002861131,0.00000111928,3.797898e-7,0.00001424661,0.00001042506],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.3519084,"threshold_uncertainty_score":0.6861418,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008792059633188642,"score_gpt":0.2309571152233443,"score_spread":0.2221650555901556,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}