{"id":"W2789182526","doi":"","title":"Influence of Free Radical Surface Activation on Si/SiC Heterogeneous Integration by Direct Wafer Bonding","year":2017,"lang":"en","type":"article","venue":"Arrow@dit (Dublin Institute of Technology)","topic":"Silicon and Solar Cell Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Dalhousie University","funders":"European Commission","keywords":"Wafer; Wafer bonding; Materials science; Direct bonding; Optoelectronics; Silicon carbide; Anodic bonding; Nanotechnology; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000149158,0.0002858287,0.0001910085,0.00009612607,0.0001279555,0.0002805721,0.0002380528,0.0002053984,0.001594538],"category_scores_gemma":[0.0002556159,0.0001669527,0.0001802293,0.0000729859,0.0001783764,0.0002315511,0.0003077789,0.0002850515,0.0002489893],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00008617312,"about_ca_system_score_gemma":0.00009770264,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002175299,"about_ca_topic_score_gemma":0.0005584757,"domain_scores_codex":[0.9998616,0.00001991972,0.000005662283,0.00003130616,0.00005203181,0.00002929138],"domain_scores_gemma":[0.9998827,0.00004464303,0.00002606131,0.00001804552,0.00001921831,0.000009346814],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004297558,0.00001485831,0.000106558,0.00006272997,0.000009942707,0.00004511699,0.00002372217,0.0001164409,0.9975443,0.00005238302,0.00002893111,0.001952006],"study_design_scores_gemma":[0.000008978804,0.0002435849,0.001147825,0.000002554066,0.00001392342,0.00006568686,0.00002129731,0.000637764,0.9971619,0.00001659573,0.0006752892,0.000004576666],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9952818,0.001035406,0.002188348,0.00002537258,0.00002741583,0.00001996331,0.00002847839,0.0000398817,0.001353422],"genre_scores_gemma":[0.9964283,0.000510423,0.002106323,0.00002245544,0.00001502692,0.00001587862,0.00003497952,0.00001998257,0.0008466194],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001594538,"threshold_uncertainty_score":0.005334258,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01342284649495363,"score_gpt":0.2342522316943847,"score_spread":0.2208293851994311,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}