{"id":"W2791032399","doi":"10.6028/nist.ir.6701","title":"Interferometric metrology of photomask blanks:","year":2000,"lang":"en","type":"report","venue":"","topic":"Optical measurement and interference techniques","field":"Computer Science","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Centennial College","funders":"Lawrence Livermore National Laboratory; National Institute of Standards and Technology","keywords":"Photomask; Metrology; Interferometry; Optics; Computer science; Engineering drawing; Engineering; Computer graphics (images); Materials science; Nanotechnology; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.001235872,0.000572159,0.0005535326,0.001086057,0.000855844,0.000713439,0.001271225,0.000696591,0.001653746],"category_scores_gemma":[0.002595256,0.0002775479,0.0002199527,0.0007046433,0.0008789239,0.0008328696,0.0007834843,0.000724105,0.000636976],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005498902,"about_ca_system_score_gemma":0.0006190373,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0008717211,"about_ca_topic_score_gemma":0.001563973,"domain_scores_codex":[0.998091,0.0002521771,0.00007060347,0.0002750847,0.001074883,0.0002362525],"domain_scores_gemma":[0.9985519,0.0003206718,0.000204953,0.0003315823,0.0005058792,0.0000849371],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0005655834,0.0001296524,0.007716289,0.0003164123,0.00002330497,0.0001547709,0.0002161656,0.001491958,0.9267195,0.002779434,0.0004231633,0.05946369],"study_design_scores_gemma":[0.00002587111,0.0004715778,0.01097305,0.00001585866,0.00001822657,0.0006138853,0.00006401109,0.003458167,0.9791667,0.0009274537,0.004227968,0.00003721175],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7891653,0.001303687,0.1992102,0.0001213165,0.0001132792,0.0003387919,0.0004788444,0.001487527,0.007781034],"genre_scores_gemma":[0.9435589,0.0002260222,0.05408098,0.00004537735,0.00001383527,0.0001324813,0.0002422429,0.00006594286,0.001634245],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001653746,"threshold_uncertainty_score":0.006536007,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.07765614792645413,"score_gpt":0.3196378344363131,"score_spread":0.241981686509859,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}