{"id":"W2791036357","doi":"10.1088/1361-6439/aaa878","title":"Study on the mechanism of Si–glass–Si two step anodic bonding process","year":2018,"lang":"en","type":"article","venue":"Journal of Micromechanics and Microengineering","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":12,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"University of Waterloo; National Natural Science Foundation of China","keywords":"Anodic bonding; Anode; Mechanism (biology); Materials science; Process (computing); Silicon; Optoelectronics; Chemistry; Computer science; Physical chemistry; Physics; Electrode","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002497613,0.0004621302,0.0003119183,0.0003012065,0.0002725672,0.0002439249,0.0007088829,0.0006020089,0.002323039],"category_scores_gemma":[0.0003167716,0.000414653,0.0004686371,0.0001533565,0.0002237427,0.0006016931,0.0003371819,0.0004961575,0.0004774152],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001838883,"about_ca_system_score_gemma":0.0002221993,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000528108,"about_ca_topic_score_gemma":0.000529176,"domain_scores_codex":[0.9997894,0.00001658441,0.000007679453,0.0000450875,0.00009614797,0.00004511839],"domain_scores_gemma":[0.9998555,0.00004793306,0.00002462232,0.00001525588,0.00004479244,0.00001175462],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004062451,0.00004250832,0.0003815757,0.0003803457,0.00003883004,0.0002733148,0.00009908999,0.0007028375,0.9910645,0.001251216,0.000196585,0.005528593],"study_design_scores_gemma":[0.00002255962,0.0002651869,0.00252336,0.00001394124,0.00004370199,0.0002913792,0.00008178726,0.01396353,0.9800015,0.0004510423,0.002321407,0.00002061835],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9582003,0.003964222,0.03206493,0.0002525513,0.0001634237,0.0001991165,0.0001190129,0.0002490664,0.004787212],"genre_scores_gemma":[0.9824389,0.001480784,0.0122643,0.00007721184,0.00002134053,0.00008994651,0.00007042646,0.0000167857,0.003540299],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002323039,"threshold_uncertainty_score":0.007771313,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01224875648229883,"score_gpt":0.2265101055769904,"score_spread":0.2142613490946915,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}