{"id":"W2791036357","doi":"10.1088/1361-6439/aaa878","title":"Study on the mechanism of Si–glass–Si two step anodic bonding process","year":2018,"lang":"en","type":"article","venue":"Journal of Micromechanics and Microengineering","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":12,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"University of Waterloo; National Natural Science Foundation of China","keywords":"Anodic bonding; Anode; Mechanism (biology); Materials science; Process (computing); Silicon; Optoelectronics; Chemistry; Computer science; Physical chemistry; Physics; Electrode","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004346234,0.0002244201,0.0003517575,0.000292272,0.00007814557,0.00004125235,0.0003447315,0.00007758885,0.000009306939],"category_scores_gemma":[0.00004322891,0.0001631681,0.00007984183,0.0002670544,0.00003962704,0.0001094194,0.00007126705,0.000386296,0.000003158436],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00004828242,"about_ca_system_score_gemma":0.00001755675,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000001875055,"about_ca_topic_score_gemma":0.000002374021,"domain_scores_codex":[0.9989346,0.00001323208,0.0004611315,0.0001266654,0.0001881411,0.0002762699],"domain_scores_gemma":[0.9993832,0.00005452855,0.0001651106,0.0002097524,0.0001317759,0.00005559202],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001768536,0.00007434857,0.00004002553,0.00008723581,0.0002048719,0.00003349768,0.001267217,0.0003039553,0.9853814,0.01025871,0.0002426265,0.002088417],"study_design_scores_gemma":[0.001372761,0.001438864,0.00009618433,0.000502125,0.0001297833,0.000418413,0.005725914,0.01418865,0.972106,0.002677194,0.0009575279,0.0003865856],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9760917,0.0006866491,0.02223622,0.00007978999,0.0005270734,0.0001876027,0.00000561007,0.00008666408,0.00009872727],"genre_scores_gemma":[0.9986992,0.0001484082,0.0009493274,0.00002076565,0.0001143123,0.000003742172,2.34623e-7,0.00004526944,0.00001873794],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.02260754,"threshold_uncertainty_score":0.6653802,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01224875648229883,"score_gpt":0.2265101055769904,"score_spread":0.2142613490946915,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}