{"id":"W2791185935","doi":"10.1116/1.5019170","title":"Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO2","year":2018,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"ZnO doping and properties","field":"Materials Science","cited_by":9,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"Prince Sattam bin Abdulaziz University","keywords":"Nitrogen; X-ray photoelectron spectroscopy; Plasma; Doping; Analytical Chemistry (journal); Atomic layer deposition; Materials science; Titanium; Spectroscopy; Layer (electronics); Titanium dioxide; Chemistry; Nanotechnology; Chemical engineering; Optoelectronics; Environmental chemistry; Metallurgy","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.001523605,0.0001755073,0.0003923081,0.0006376661,0.0006177828,0.00008932779,0.0006203646,0.0002188039,0.00005838233],"category_scores_gemma":[0.0001393199,0.0001312193,0.00007640762,0.0007772226,0.001889306,0.0005806463,0.0001513636,0.0001941923,0.000006326077],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00006486843,"about_ca_system_score_gemma":0.0003501331,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00003389409,"about_ca_topic_score_gemma":0.00001073518,"domain_scores_codex":[0.9982523,0.00003916278,0.0006213603,0.0003107451,0.0003705931,0.0004058609],"domain_scores_gemma":[0.9982443,0.00008622709,0.0006114593,0.0002255253,0.0007445067,0.00008793575],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001426712,0.00004920825,0.005431764,0.00003436327,0.00001529383,0.000003924246,0.00008150911,0.00006151874,0.989813,0.004057816,0.0001338788,0.0001750358],"study_design_scores_gemma":[0.0005107277,0.0008745042,0.002832095,0.0001513091,0.00003873522,0.0004831156,0.0001966719,0.001914725,0.9814885,0.01110372,0.0002389734,0.0001669382],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9879329,0.0004091076,0.01024608,0.0006247078,0.0004150509,0.0002408651,0.00003669182,0.00005497291,0.00003967115],"genre_scores_gemma":[0.9611967,0.00005383323,0.03859842,0.00003728649,0.00006418346,0.00001715631,0.000001611013,0.00001037876,0.00002038829],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.02835234,"threshold_uncertainty_score":0.6961225,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02177529330582917,"score_gpt":0.2721147892013723,"score_spread":0.2503394958955432,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}