{"id":"W2791185935","doi":"10.1116/1.5019170","title":"Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO2","year":2018,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"ZnO doping and properties","field":"Materials Science","cited_by":9,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"Prince Sattam bin Abdulaziz University","keywords":"Nitrogen; X-ray photoelectron spectroscopy; Plasma; Doping; Analytical Chemistry (journal); Atomic layer deposition; Materials science; Titanium; Spectroscopy; Layer (electronics); Titanium dioxide; Chemistry; Nanotechnology; Chemical engineering; Optoelectronics; Environmental chemistry; Metallurgy","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001371106,0.0004417712,0.0003386162,0.0002397737,0.000251797,0.0002408577,0.0005096481,0.0003988135,0.0005770409],"category_scores_gemma":[0.0001361809,0.0002867926,0.0002920242,0.0001674277,0.0001727915,0.0003106413,0.0002836293,0.000399223,0.0002183328],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002815862,"about_ca_system_score_gemma":0.0002164353,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007803668,"about_ca_topic_score_gemma":0.002452771,"domain_scores_codex":[0.9997935,0.00001237475,0.00001098398,0.00005138403,0.0001124148,0.00001939893],"domain_scores_gemma":[0.9999461,0.000009885293,0.00001234643,0.00001156964,0.00001428092,0.000005731218],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000004545073,0.000003119332,0.00003865693,0.00003714758,0.000002649859,0.00002135972,0.000008448552,0.00003037413,0.9989165,0.00004193666,0.00002318667,0.0008721781],"study_design_scores_gemma":[0.000008466564,0.0000796458,0.001139351,0.000003171149,0.00001043901,0.000340162,0.0000120346,0.001607453,0.9928166,0.00003772132,0.003933622,0.00001129671],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8726752,0.005922538,0.1139264,0.0002389419,0.0003569832,0.0002334542,0.0004546388,0.0006756588,0.005516142],"genre_scores_gemma":[0.9119638,0.001770443,0.08222737,0.00007554462,0.00004188551,0.0001212738,0.0003201344,0.00006772099,0.003411777],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0007803668,"threshold_uncertainty_score":0.002043068,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02177529330582917,"score_gpt":0.2721147892013723,"score_spread":0.2503394958955432,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}