{"id":"W2791770405","doi":"","title":"Work function tuning of reactively sputtered MoxSiyNz metal gate electrodes for advanced CMOS technology","year":2008,"lang":"en","type":"article","venue":"Library and Archives Canada (Government of Canada)","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"","keywords":"CMOS; Work function; Materials science; Electrode; Metal gate; Optoelectronics; Function (biology); Work (physics); Electrical engineering; Electronic engineering; Metal; Metallurgy; Transistor; Gate oxide; Engineering; Voltage; Mechanical engineering; Physics","routes":{"ca_aff":false,"ca_fund":false,"ca_venue":true,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000005678272,0.0001257191,0.0002285721,0.00003120814,0.00006523589,0.000004156821,0.00009271,0.00002638115,0.0000115884],"category_scores_gemma":[0.000002632982,0.0001243847,0.00002063987,0.00008421684,0.00004378829,0.000232401,0.0000264505,0.00005818659,1.016823e-9],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000005252814,"about_ca_system_score_gemma":0.0001716094,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002181667,"about_ca_topic_score_gemma":0.0006266386,"domain_scores_codex":[0.9991438,0.00001026267,0.0002055856,0.0001302786,0.000314446,0.0001956031],"domain_scores_gemma":[0.9996714,0.00008005328,0.00008449279,0.0001033824,8.085345e-7,0.00005988889],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0003095062,0.000005772966,0.001932707,0.0001149094,0.00008218233,0.000005512606,0.00002754099,0.0004947947,0.9918322,0.002976879,0.0001137811,0.002104228],"study_design_scores_gemma":[0.0003125981,0.00007770795,0.009707734,0.00005509431,0.00001897235,0.000005895357,0.0004036457,0.0006908214,0.9840397,0.000651957,0.0038893,0.0001465605],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9911135,0.0005569948,0.0003524351,0.0001775054,0.0002413916,0.0001317203,0.00006662517,0.00003056154,0.007329308],"genre_scores_gemma":[0.9977502,0.0001294956,0.001676146,0.00007833212,0.0000312116,0.00001385689,0.000006309333,0.00002070619,0.0002937488],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.007792472,"threshold_uncertainty_score":0.507226,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004152868879615791,"score_gpt":0.1322185967330428,"score_spread":0.128065727853427,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}