{"id":"W2792221389","doi":"10.3390/jmmp2010008","title":"Modal Analysis, Metrology, and Error Budgeting of a Precision Motion Stage","year":2018,"lang":"en","type":"article","venue":"Journal of Manufacturing and Materials Processing","topic":"Advanced Measurement and Metrology Techniques","field":"Engineering","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"Natural Sciences and Engineering Research Council of Canada; University of Waterloo","keywords":"Interferometry; Optics; Metrology; Machining; Accuracy and precision; Voice coil; Actuator; Modal; Acoustics; Laser; Physics; Computer science; Materials science; Engineering; Mechanical engineering; Magnet","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0008009755,0.0001081364,0.0003539823,0.0003319855,0.00006120776,0.00003176273,0.00005772851,0.00007839756,0.00001136669],"category_scores_gemma":[0.00004540216,0.00008676986,0.00003251014,0.00006691754,0.00006143808,0.00024893,0.00002598188,0.00008594592,1.024694e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001701467,"about_ca_system_score_gemma":0.000006908142,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000002972625,"about_ca_topic_score_gemma":0.000002423694,"domain_scores_codex":[0.9992203,0.00003486569,0.0004034675,0.00009161924,0.0001165131,0.0001332372],"domain_scores_gemma":[0.9994966,0.00002334773,0.0002939011,0.00005652845,0.00008613386,0.00004348396],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001748252,0.00001822271,0.0004917752,0.000393664,0.0002163734,0.000004185074,0.0004114343,0.0005085072,0.9122319,0.00001027552,0.00001008808,0.08552875],"study_design_scores_gemma":[0.0002660753,0.0001380996,0.007354496,0.00008175633,0.0002064486,0.00001984198,0.00007226623,0.0004363865,0.9907612,0.0004628778,0.0001235164,0.00007703624],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9215241,0.0005689231,0.07764572,0.00001475083,0.0001180193,0.00004130411,0.000002364534,0.00003573684,0.00004904859],"genre_scores_gemma":[0.9827809,0.0001506036,0.01691655,0.000007632507,0.0001222292,0.000001012252,8.178975e-7,0.00001152417,0.000008718365],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.08545172,"threshold_uncertainty_score":0.3538372,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01594314920180081,"score_gpt":0.267970069366657,"score_spread":0.2520269201648562,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}