{"id":"W2792221389","doi":"10.3390/jmmp2010008","title":"Modal Analysis, Metrology, and Error Budgeting of a Precision Motion Stage","year":2018,"lang":"en","type":"article","venue":"Journal of Manufacturing and Materials Processing","topic":"Advanced Measurement and Metrology Techniques","field":"Engineering","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"Natural Sciences and Engineering Research Council of Canada; University of Waterloo","keywords":"Interferometry; Optics; Metrology; Machining; Accuracy and precision; Voice coil; Actuator; Modal; Acoustics; Laser; Physics; Computer science; Materials science; Engineering; Mechanical engineering; Magnet","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.001198458,0.0004501752,0.0003093049,0.0008415631,0.0003536973,0.0005061742,0.0007227076,0.0004219945,0.001320176],"category_scores_gemma":[0.004469112,0.0002760594,0.0002816536,0.0003735014,0.0004272672,0.0009065433,0.0005136076,0.000303598,0.0001938779],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005741752,"about_ca_system_score_gemma":0.0005689996,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001591905,"about_ca_topic_score_gemma":0.00222352,"domain_scores_codex":[0.9985869,0.0001489613,0.00006252024,0.0002258438,0.000893135,0.00008267607],"domain_scores_gemma":[0.997308,0.001159658,0.0003452102,0.0004230687,0.0007275431,0.00003644306],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0006847435,0.00009257384,0.01414848,0.0002929322,0.00005893854,0.0001072097,0.0003538038,0.0969784,0.7596567,0.003186379,0.0001738341,0.124266],"study_design_scores_gemma":[0.00002360866,0.001145525,0.03443972,0.00003004974,0.00007865771,0.0003170168,0.0001634378,0.3608216,0.5994131,0.001210222,0.002273736,0.00008327662],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6429412,0.0003148784,0.3533409,0.00007578464,0.00001971166,0.0000592739,0.0001401289,0.0004749844,0.002633136],"genre_scores_gemma":[0.9591263,0.00004676208,0.03979313,0.000007141783,0.000004103829,0.00002624562,0.00008012613,0.00004430822,0.0008717873],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001591905,"threshold_uncertainty_score":0.00633812,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01594314920180081,"score_gpt":0.267970069366657,"score_spread":0.2520269201648562,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}