{"id":"W2793605707","doi":"10.1177/0142331218757860","title":"A robust control approach for MEMS capacitive micromachined ultrasonic transducer","year":2018,"lang":"en","type":"article","venue":"Transactions of the Institute of Measurement and Control","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":10,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Capacitive micromachined ultrasonic transducers; Control theory (sociology); Capacitive sensing; Integral sliding mode; Robustness (evolution); Nonlinear system; Ultrasonic sensor; Ultrasonic motor; Engineering; Sliding mode control; Computer science; Acoustics; Piezoelectricity; Physics; Electrical engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002041844,0.0001492867,0.0002817239,0.00005957117,0.0001279216,0.000006275114,0.0001707235,0.00008194892,0.000004958421],"category_scores_gemma":[0.00002018299,0.0001088942,0.000145842,0.00009874768,0.0003614294,0.0001252702,0.000001193181,0.0001158199,1.7795e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00003630958,"about_ca_system_score_gemma":0.00002585561,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00003434191,"about_ca_topic_score_gemma":0.0001318055,"domain_scores_codex":[0.9992824,0.000006226982,0.0002460371,0.0001301027,0.0001699244,0.0001653444],"domain_scores_gemma":[0.9995272,0.0000224572,0.00005733425,0.0002016689,0.0001636692,0.00002767953],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001691031,0.00006891423,0.000009708534,0.0001207711,0.0003732413,5.407086e-8,0.0001792232,0.01777367,0.9732014,0.0002053156,0.0000215433,0.007877083],"study_design_scores_gemma":[0.008423823,0.0003424572,0.0004772569,0.0001323669,0.0006035262,0.000007668064,0.0002276529,0.01379208,0.9734867,0.0005245099,0.001687161,0.0002948297],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.07073282,0.0006496381,0.9267942,0.0001416547,0.0003069486,0.0007847152,0.0001024221,0.00009317058,0.0003944529],"genre_scores_gemma":[0.9941901,0.00005744338,0.005551515,0.00001585329,0.00003571847,0.0001135775,8.305097e-7,0.00001497218,0.00001997936],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.9234573,"threshold_uncertainty_score":0.4440576,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02643007526910347,"score_gpt":0.201487622528999,"score_spread":0.1750575472598955,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}