{"id":"W2794347364","doi":"10.1088/1361-6439/aaafb2","title":"Nonlinear dynamic modeling of a V-shaped metal based thermally driven MEMS actuator for RF switches","year":2018,"lang":"en","type":"article","venue":"Journal of Micromechanics and Microengineering","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":9,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"American University of Sharjah; University of Sharjah","keywords":"Microelectromechanical systems; Actuator; Nonlinear system; Materials science; Optoelectronics; Electronic engineering; Engineering; Electrical engineering; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00008373636,0.0003636114,0.0002389886,0.0001652472,0.0001952289,0.000340158,0.0006634137,0.0006484604,0.001037732],"category_scores_gemma":[0.0001311938,0.0002253585,0.0004504643,0.0001181534,0.0003036738,0.0003555364,0.0002328173,0.0002429313,0.0003416424],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003430458,"about_ca_system_score_gemma":0.0002858344,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001491274,"about_ca_topic_score_gemma":0.00128043,"domain_scores_codex":[0.999916,0.00001408214,0.000002896135,0.00002350898,0.00003249819,0.00001106282],"domain_scores_gemma":[0.9999534,0.00001356698,0.000009769769,0.000007752205,0.00001202493,0.000003425031],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.00004772175,0.00003667751,0.0007760842,0.00006891595,0.00002943592,0.0002222984,0.00009607753,0.8441216,0.1407006,0.005813453,0.00029671,0.007790397],"study_design_scores_gemma":[0.000001368608,0.00001622534,0.0001641396,0.000002413034,0.000002536923,0.0000206428,0.000005665152,0.9964644,0.002526697,0.0001714995,0.000621706,0.000002686827],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.2616294,0.0008293128,0.7126138,0.0002524154,0.00007621977,0.00007098057,0.0002052146,0.0004545601,0.02386799],"genre_scores_gemma":[0.9755356,0.0002749577,0.01439497,0.00004878633,0.00001302326,0.00008144756,0.00007806858,0.00002908412,0.009544173],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.001491274,"threshold_uncertainty_score":0.003471613,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009595493880451928,"score_gpt":0.2185334930771656,"score_spread":0.2089379991967137,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}