{"id":"W2799413025","doi":"10.1107/s1600577518004939","title":"Characterization of the surface contamination of deep X-ray lithography mirrors exposed to synchrotron radiation","year":2018,"lang":"en","type":"article","venue":"Journal of Synchrotron Radiation","topic":"Advanced X-ray Imaging Techniques","field":"Physics and Astronomy","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"Canadian Light Source (Canada); University of Saskatchewan","funders":"Sandia National Laboratories","keywords":"Materials science; Optics; Synchrotron radiation; Lithography; Extreme ultraviolet; Extreme ultraviolet lithography; Synchrotron; Surface roughness; Resist; Analytical Chemistry (journal); Layer (electronics); Optoelectronics; Laser; Physics; Nanotechnology; Chemistry; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":true,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000536903,0.0001875035,0.0003605375,0.0002986852,0.0001018127,0.00002645605,0.0003086211,0.00006760875,0.00006784482],"category_scores_gemma":[0.00006737268,0.0001577313,0.0002116799,0.0006189725,0.000112418,0.0006842125,0.00003425875,0.0001723172,0.000003376321],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001335015,"about_ca_system_score_gemma":0.0000950357,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00002986649,"about_ca_topic_score_gemma":0.000002446316,"domain_scores_codex":[0.9980624,0.0001930764,0.0009031948,0.0001707076,0.000471275,0.0001992866],"domain_scores_gemma":[0.996689,0.00007438108,0.002095918,0.0002989576,0.0007639907,0.00007775841],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00009408325,0.0001439414,0.06490543,0.00002826979,0.00007967363,1.748094e-7,0.001257743,0.0006523592,0.8722813,0.0007354715,0.00005116117,0.05977044],"study_design_scores_gemma":[0.0007901629,0.0004853365,0.2762921,0.0001621117,0.00008839535,0.000001655212,0.0001585931,0.002256943,0.7180303,0.0005573533,0.001012915,0.0001641382],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7787381,0.00005195834,0.2199842,0.0002689875,0.0003409897,0.0004924944,0.00002209964,0.00001550409,0.00008565968],"genre_scores_gemma":[0.992295,0.00001715529,0.007217478,0.00003925305,0.0003490545,0.0000104198,0.00002600036,0.00002747978,0.00001811775],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.2135569,"threshold_uncertainty_score":0.6432096,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007671455117857973,"score_gpt":0.2584536725342738,"score_spread":0.2507822174164158,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}