{"id":"W2803468448","doi":"10.1039/c8nr02451k","title":"Atomic-scale etching of hexagonal boron nitride for device integration based on two-dimensional materials","year":2018,"lang":"en","type":"article","venue":"Nanoscale","topic":"Graphene research and applications","field":"Materials Science","cited_by":31,"is_retracted":false,"has_abstract":true,"ca_institutions":"Kootenay Association for Science & Technology","funders":"Ministry of Science, ICT and Future Planning","keywords":"Etching (microfabrication); Materials science; Hexagonal boron nitride; Atomic units; Boron nitride; Hexagonal crystal system; Dry etching; Nanotechnology; Scale (ratio); Nitride; Boron; Optoelectronics; Crystallography; Chemistry; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0006149158,0.0001174713,0.000183363,0.00009571097,0.0002049931,0.00004614348,0.0002129138,0.00006077182,0.0005297064],"category_scores_gemma":[0.0001039276,0.00009790429,0.00006392752,0.0001546832,0.0001472329,0.0001041791,0.00003713984,0.00005173557,0.0001330905],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00004102571,"about_ca_system_score_gemma":0.0001290249,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001903929,"about_ca_topic_score_gemma":0.000119208,"domain_scores_codex":[0.9987307,0.00008149221,0.0002915287,0.0002890317,0.0003259991,0.0002812718],"domain_scores_gemma":[0.9990134,0.0002384831,0.0001183813,0.0002677051,0.0002680247,0.00009404754],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0002394927,0.0001096738,0.00009409685,0.00001841794,0.000002188307,1.300826e-7,0.00003459886,0.00004083417,0.9963575,0.001233672,0.001304478,0.0005649284],"study_design_scores_gemma":[0.0006364179,0.0002291121,0.001029501,0.00005955069,0.000008799329,9.614793e-7,0.00001872749,0.002415915,0.9926376,0.002259463,0.0006029512,0.0001010213],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9924433,0.00001170508,0.005764543,0.0004228731,0.0002017668,0.0004362011,0.0003109466,0.00004071652,0.0003679033],"genre_scores_gemma":[0.985827,6.483523e-7,0.01337787,0.0002601266,0.0002177173,0.0001316049,0.00008209587,0.00001593576,0.00008696556],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.007613323,"threshold_uncertainty_score":0.5799913,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02350716892742942,"score_gpt":0.3163982795565671,"score_spread":0.2928911106291376,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}