{"id":"W2803662606","doi":"10.1149/ma2018-01/22/1376","title":"Cu/Cu Barrier Interconnect with Low Resistivity for the Application to the Next-Generation and High-Resolution Display Fabricated Using Microwave-Assisted Sputter","year":2018,"lang":"en","type":"article","venue":"ECS Meeting Abstracts","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Kootenay Association for Science & Technology","funders":"","keywords":"Materials science; Capacitance; Interconnection; Optoelectronics; Resistor; Electrical resistivity and conductivity; Capacitor; Electrical engineering; SIGNAL (programming language); Microwave; Electrode; Computer science; Voltage; Telecommunications; Physics; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.001534004,0.0001801529,0.0001623597,0.00003791133,0.0008752116,0.0003451971,0.0002352433,0.00008131388,0.00001473459],"category_scores_gemma":[0.0005500034,0.00009717059,0.00003912539,0.0001468036,0.0002214075,0.0001822882,0.000095495,0.0001125381,0.00002823317],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000973341,"about_ca_system_score_gemma":0.00005042293,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.002091809,"about_ca_topic_score_gemma":0.002847909,"domain_scores_codex":[0.9985616,0.0001300245,0.0003226022,0.0004988231,0.0001858973,0.0003010601],"domain_scores_gemma":[0.9985232,0.0004752255,0.0002091954,0.0004529425,0.0002589504,0.00008046392],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001460252,0.00003263866,0.0001273735,0.00002359711,0.00001091977,4.076578e-7,0.0005377477,0.002905493,0.9932063,0.0000168553,0.0004680569,0.00252464],"study_design_scores_gemma":[0.0003663494,0.0001848951,0.03474618,0.000159178,0.00008509157,0.00002024816,0.000221713,0.07468305,0.8865491,0.00006205067,0.002665797,0.0002564177],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9765436,0.00005130571,0.01951758,0.002336971,0.0004515236,0.0008457733,0.00002825498,0.00005111285,0.000173879],"genre_scores_gemma":[0.9948446,0.000001950456,0.003984884,0.0003912763,0.0006202302,0.00007859679,0.00001301711,0.00002182165,0.00004368036],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1066572,"threshold_uncertainty_score":0.6731508,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03404154913570272,"score_gpt":0.2699488834718074,"score_spread":0.2359073343361047,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}