{"id":"W2842665777","doi":"10.1038/s41467-018-05171-y","title":"Lithography for robust and editable atomic-scale silicon devices and memories","year":2018,"lang":"en","type":"article","venue":"Nature Communications","topic":"Force Microscopy Techniques and Applications","field":"Physics and Astronomy","cited_by":124,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Institute for Nanotechnology; Memorial University of Newfoundland; University of Alberta","funders":"Natural Sciences and Engineering Research Council of Canada; Alberta Innovates - Technology Futures","keywords":"Lithography; Fabrication; Silicon; Computer science; Nanotechnology; Atomic units; Thermal stability; Scale (ratio); Scanning tunneling microscope; Materials science; Thermal; Optoelectronics; Chemistry; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002372497,0.0002118646,0.0001553491,0.0002477168,0.0001821067,0.000373739,0.0004610432,0.0002523402,0.002394981],"category_scores_gemma":[0.0004306018,0.0001722783,0.0001776894,0.0001602564,0.0003563279,0.0003143271,0.0004155704,0.0005056464,0.0006876542],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002240627,"about_ca_system_score_gemma":0.0001238183,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001960456,"about_ca_topic_score_gemma":0.0004687479,"domain_scores_codex":[0.999792,0.00002538388,0.00001743782,0.00003097063,0.0001099833,0.00002418149],"domain_scores_gemma":[0.9997817,0.0000610981,0.00004500947,0.00007284262,0.00002589925,0.00001353837],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002262885,0.00002182406,0.0002760284,0.0001060336,0.00001312861,0.0002457687,0.0000621278,0.002333307,0.966887,0.007229089,0.001117978,0.02168514],"study_design_scores_gemma":[0.00001565118,0.0001320438,0.0006033995,0.0000136195,0.000008567603,0.0002528884,0.00002680392,0.01530727,0.9625714,0.001534083,0.01951539,0.00001884315],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.5775509,0.003898773,0.3881766,0.001030991,0.0008501706,0.0002389305,0.0006759663,0.004389541,0.02318815],"genre_scores_gemma":[0.7811217,0.0007044678,0.2118585,0.0001471079,0.0000738172,0.00009281056,0.0002096467,0.0001958555,0.005596155],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002394981,"threshold_uncertainty_score":0.008011997,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01159332251112681,"score_gpt":0.3003507029594198,"score_spread":0.288757380448293,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}