{"id":"W2848631016","doi":"10.1016/j.tsf.2018.05.054","title":"Impact of negative oxygen ions on the deposition processes of RF-magnetron sputtered SrTiO3 thin films","year":2018,"lang":"en","type":"article","venue":"Thin Solid Films","topic":"Electronic and Structural Properties of Oxides","field":"Materials Science","cited_by":17,"is_retracted":false,"has_abstract":false,"ca_institutions":"Plasmionique (Canada); Institut National de la Recherche Scientifique","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Thin film; Sputter deposition; Sputtering; Materials science; Substrate (aquarium); Etching (microfabrication); Strontium titanate; Silicon; Deposition (geology); Crystallite; Ion plating; Analytical Chemistry (journal); Wafer; Cavity magnetron; Chemistry; Nanotechnology; Optoelectronics; Metallurgy","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["insufficient_payload"],"consensus_categories":[],"category_scores_codex":[0.000317213,0.0001912756,0.0002784269,0.00004863631,0.0002150863,0.00004550567,0.0004653092,0.00008529598,0.001686016],"category_scores_gemma":[0.0002656605,0.0001050227,0.0001045569,0.0002055079,0.0004779625,0.0002517834,0.00008056147,0.0001495575,0.0000723354],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00004611717,"about_ca_system_score_gemma":0.0001809014,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0009092386,"about_ca_topic_score_gemma":0.00006808907,"domain_scores_codex":[0.9986383,0.0000878335,0.0003721287,0.0002434478,0.0003190783,0.0003391757],"domain_scores_gemma":[0.9988473,0.0001414829,0.0003116965,0.0003654035,0.0002823641,0.00005176877],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0002663506,0.00005632216,0.0001364526,0.00005370399,0.00003579949,6.818709e-7,0.003028315,0.0004466646,0.9915566,0.0005232063,0.003768064,0.0001278727],"study_design_scores_gemma":[0.0002523672,0.001868294,0.009313641,0.0001218068,0.00002560771,0.000006083369,0.0003321748,0.001215596,0.984356,0.002359724,0.000005556,0.0001431677],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.996407,0.0001582009,0.0000670605,0.0003158591,0.0001287635,0.0002959127,0.00006298292,0.00004880321,0.002515438],"genre_scores_gemma":[0.9983934,0.00002392893,0.001083664,0.0001258685,0.00008066589,0.00001423038,0.000008718105,0.00001608309,0.0002534382],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.009177188,"threshold_uncertainty_score":0.9992266,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02020604568663573,"score_gpt":0.278302828012614,"score_spread":0.2580967823259782,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}